Study on dynamic characterization of a shunt capacitive RF MEMS switch

2006 ◽  
Author(s):  
Zhihao Hou ◽  
Zewen Liu ◽  
Xiaofeng Lei ◽  
Guangwei Hu ◽  
Litian Liu ◽  
...  
Keyword(s):  
Rf Mems ◽  
Dynamic Characterization ◽  
Rf Mems Switch ◽  
Mems Switch

Electromechanical characterization of Nitinol based RF MEMS switch

2020 ◽  
Vol 27 ◽  
pp. 443-445 ◽  
Author(s):  
Ajay Sudhir Bale ◽  
Suhaas V. Reddy ◽  
Shivashankar A. Huddar
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Electromechanical Characterization

Characterization of RF-MEMS switch using PZT thin films

2004 ◽  
Vol 2004.7 (0) ◽  
pp. 359-360
Author(s):  
Hironobu ENDO ◽  
Takaaki SUZUKI ◽  
Isaku KANNO ◽  
Hidetoshi KOTERA
Keyword(s):  
Thin Films ◽  
Rf Mems ◽  
Rf Mems Switch ◽  
Pzt Thin Films ◽  
Mems Switch

Optimization of Contact Dynamics for an RF MEMS Switch

2002 ◽  
Author(s):  
Ryszard J. Pryputniewicz ◽  
Cosme Furlong ◽  
Emily J. Pryputniewicz
Keyword(s):  
Material Properties ◽  
Rf Mems ◽  
Contact Dynamics ◽  
Experimental Characterization ◽  
Simple Analytical Model ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Resistive Switches ◽  
Functional Operation

Functional operation of RF MEMS resistive switches depends on dynamic characteristics of the cantilever contacts. Characteristics of these contacts, in turn, depend on parameters defining their shape and dimensions, material properties, boundary conditions, and actuation voltages. In this paper, a simple analytical model is presented and used to develop an understanding of the switch behavior. In addition, uncertainties corresponding to this model are also determined to quantitatively show the influence that various parameters defining the cantilever contact have on its dynamics which, in turn, influences performance of the RF MEMS switch. This performance can be optimized with the objective of achieving resonance frequency within, e.g., 1% of the desired value while constraining the nominal dimensions and finding the optimum set of uncertainties in these dimensions. Analytical results correlate well with the preliminary experimental characterization of the contacts.

Characterization of fringing electric field on capacitive RF MEMS switch membrane

2015 ◽  
Vol 27 (2) ◽  
pp. 24138
Author(s):  
李君儒 Li Junru ◽  
高杨 Gao Yang ◽  
何婉婧 He Wanjing ◽  
蔡洵 Cai Xun
Keyword(s):  
Electric Field ◽  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Fringing Electric Field

Characterization of an embedded RF-MEMS switch

2010 ◽  
Author(s):  
M. Kaynak ◽  
K. E. Ehwald ◽  
R. Scholz ◽  
F. Korndorfer ◽  
C. Wipf ◽  
...  
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch

Fabrication and characterization of RF-MEMS switch in V-band

2009 ◽  
Author(s):  
Thanh Mai Vu ◽  
Gaetan Prigent ◽  
Jinyu Ruan ◽  
Alexandre Rumeau ◽  
Patrick Pons ◽  
...  
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
V Band ◽  
Fabrication And Characterization

Design and characterization of a simplified planar 16×8 RF MEMS switch matrix for a GEO-stationary data relay

2012 ◽  
Author(s):  
Sascha A. Figur ◽  
Erika Meniconi ◽  
Ulrich Prechtel ◽  
Volker Ziegler ◽  
Bernhard Schoenlinner ◽  
...  
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch
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