Defect passivation and interface engineering for high-K gate dielectric device performance and reliability enhancement

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings ◽

10.1109/icsict.2006.306253 ◽

2006 ◽

Author(s):

Hsing-huang Tseng

Keyword(s):

Gate Dielectric ◽

Device Performance ◽

Interface Engineering ◽

High K ◽

Defect Passivation ◽

Reliability Enhancement ◽

High K Gate Dielectric

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Interface Engineering for High-K Gate Dielectric Device Performance and Reliability Enhancement

ECS Meeting Abstracts ◽

10.1149/ma2005-02/13/546 ◽

2005 ◽

Keyword(s):

Gate Dielectric ◽

Device Performance ◽

Interface Engineering ◽

High K ◽

Reliability Enhancement ◽

High K Gate Dielectric

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Interface Engineering for the Enhancement of Carrier Transport in Black Phosphorus Transistor with Ultra-Thin High-k Gate Dielectric

Scientific Reports ◽

10.1038/srep26609 ◽

2016 ◽

Vol 6 (1) ◽

Cited By ~ 23

Author(s):

Zhi-Peng Ling ◽

Jun-Tao Zhu ◽

Xinke Liu ◽

Kah-Wee Ang

Keyword(s):

Carrier Transport ◽

Gate Dielectric ◽

Black Phosphorus ◽

Interface Engineering ◽

High K ◽

High K Gate Dielectric

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Epitaxial lanthanide oxide thin films on Si for high-k gate dielectric application: Growth optimization and defect passivation

Journal of Materials Research ◽

10.1557/jmr.2017.22 ◽

2017 ◽

Vol 32 (4) ◽

pp. 699-716 ◽

Cited By ~ 4

Author(s):

Ayan Roy Chaudhuri ◽

Andrea Fissel ◽

Hans Jörg Osten

Keyword(s):

Thin Films ◽

Gate Dielectric ◽

Oxide Thin Films ◽

Lanthanide Oxide ◽

Growth Optimization ◽

High K ◽

Defect Passivation ◽

Image Position ◽

High K Gate Dielectric

Abstract

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The impact of high-k gate dielectric on Junctionless Vertical Double Gate MOSFET

International Journal of Computer Sciences and Engineering ◽

10.26438/ijcse/v6i6.14751478 ◽

2018 ◽

Vol 6 (6) ◽

pp. 1475-1478

Author(s):

Jagdeep Rahul

Keyword(s):

Gate Dielectric ◽

Double Gate ◽

High K ◽

Double Gate Mosfet ◽

The Impact ◽

High K Gate Dielectric

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Development of High-K Gate Dielectric Materials

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2008.00865 ◽

2008 ◽

Vol 23 (5) ◽

pp. 865-871 ◽

Cited By ~ 2

Author(s):

De-Qi WU

Keyword(s):

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Optimization of Device Dimensions of High-k Gate Dielectric Based DG-TFET for Improved Analog/RF Performance

Silicon ◽

10.1007/s12633-021-01127-y ◽

2021 ◽

Author(s):

Shubham Tayal ◽

Goyal Vibhu ◽

Shweta Meena ◽

Ravi Gupta

Keyword(s):

Gate Dielectric ◽

High K ◽

Rf Performance ◽

High K Gate Dielectric

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Lanthanum Doped Zirconium Oxide (LaZrO2) High-k Gate Dielectric FinFET SRAM Cell Optimization

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-021-00296-2 ◽

2021 ◽

Author(s):

Gurpurneet Kaur ◽

Sandeep Singh Gill ◽

Munish Rattan

Keyword(s):

Zirconium Oxide ◽

Gate Dielectric ◽

High K ◽

Sram Cell ◽

High K Gate Dielectric

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Polarity dependent reliability of advanced MOSFET using MOCVD nitrided Hf-silicate high-k gate dielectric

IEEE International Integrated Reliability Workshop Final Report 2002 IRWS-02 ◽

10.1109/irws.2002.1194241 ◽

2003 ◽

Cited By ~ 2

Author(s):

J. Zhang ◽

E. Zhao ◽

Q. Xiang ◽

J. Chan ◽

J. Jeon ◽

...

Keyword(s):

Gate Dielectric ◽

High K ◽

High K Gate Dielectric

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Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(02)00964-x ◽

2002 ◽

Vol 303 (1) ◽

pp. 54-63 ◽

Cited By ~ 54

Author(s):

P.S. Lysaght ◽

P.J. Chen ◽

R. Bergmann ◽

T. Messina ◽

R.W. Murto ◽

...

Keyword(s):

Thermal Stability ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

Thermal Stability Of ◽

High K Gate Dielectric

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Impact of nitrogen concentration on the performance of LaAlO3(1−y/2)Ny films for high-k gate dielectric applications

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/3/013 ◽

2005 ◽

Vol 38 (3) ◽

pp. 442-445 ◽

Cited By ~ 6

Author(s):

G H Shi ◽

X B Lu ◽

X K Kong ◽

Z G Liu

Keyword(s):

Gate Dielectric ◽

Nitrogen Concentration ◽

High K ◽

High K Gate Dielectric

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