Virtual reality-based rapid prototyping design for micro-electro-mechanical system

2002 ◽  
Author(s):  
Zhao Xin ◽  
Lu Bin ◽  
Lu Gui-zhang ◽  
Huang Ya-lou
Keyword(s):  
Virtual Reality ◽  
Rapid Prototyping ◽  
Mechanical System ◽  
Micro Electro Mechanical System

Technology of SMD MOX Gas Sensors Rapid Prototyping

2020 ◽  
Vol 977 ◽  
pp. 231-237 ◽  
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Denis Veselov ◽  
Boris Podlepetsky ◽  
Maya Etrekova ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Rapid Prototyping ◽  
Mechanical System ◽  
Gas Sensors ◽  
Complete Solution ◽  
Micro Electro Mechanical System ◽  
Clean Room ◽  
Fast Prototyping ◽  
Laser Micromilling

This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

scholarly journals A bibliometric analysis of micro electro mechanical system energy harvester research

Heliyon ◽  
2021 ◽  
Vol 7 (3) ◽  
pp. e06406
Author(s):  
Ida Hamidah ◽  
Roer Eka Pawinanto ◽  
Budi Mulyanti ◽  
Jumril Yunas
Keyword(s):  
Mechanical System ◽  
Bibliometric Analysis ◽  
Energy Harvester ◽  
Micro Electro Mechanical System ◽  
System Energy

On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

2016 ◽  
Vol 70 (5) ◽  
pp. 897-904 ◽  
Author(s):  
Mazen Erfan ◽  
Yasser M Sabry ◽  
Mohammad Sakr ◽  
Bassem Mortada ◽  
Mostafa Medhat ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Mechanical System ◽  
Gas Sensing ◽  
Fourier Transform Infrared ◽  
Micro Electro Mechanical System ◽  
Ft Ir ◽  
On Chip

A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

2021 ◽  
Vol 332 ◽  
pp. 113129
Author(s):  
Ara Yeon ◽  
Hong Goo Yeo ◽  
Yongrae Roh ◽  
Kyungseop Kim ◽  
Hee-Seon Seo ◽  
...  
Keyword(s):  
Mechanical System ◽  
Proof Mass ◽  
Micro Electro Mechanical System ◽  
Beam Pattern ◽  
Vector Sensor

Micro-electro-mechanical system (MEMS) component research and development for army missile applications

1999 ◽  
Author(s):  
Tracy D. Hudson ◽  
Deanna K. McMillen ◽  
Paul R. Ashley ◽  
Paul B. Ruffin ◽  
Janet Baeder
Keyword(s):  
Research And Development ◽  
Mechanical System ◽  
Micro Electro Mechanical System
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