Design of Optical MEMS based Tunable Variable Optical Attenuator

2019 ◽  
Author(s):  
Ishan Kumar ◽  
Prasant Kumar Pattnaik
Keyword(s):  
Optical Mems ◽  
Variable Optical Attenuator

Waveguide-MEMS cascaded variable optical attenuator with enhanced performance

2004 ◽  
Author(s):  
Yunsong Jeong ◽  
Sangchul Bae ◽  
Kyunghwan Oh ◽  
Hoon Jeong ◽  
Young June Cho
Keyword(s):  
Variable Optical Attenuator

VOA-based optical MEMS accelerometer

2011 ◽  
Author(s):  
Kazem Zandi ◽  
Jing Zou ◽  
Brian Wong ◽  
Roman V. Kruzelecky ◽  
Yves-Alain Peter
Keyword(s):  
Optical Mems ◽  
Mems Accelerometer

Simulation of micro-mirrors for optical MEMS

2017 ◽  
Author(s):  
M. Zanuccoli ◽  
C. Fiegna ◽  
E. Cianci ◽  
C. Wiemer ◽  
A. Lamperti ◽  
...  
Keyword(s):  
Optical Mems

Design and use of compact lensed fibers for low cost packaging of optical MEMS components

2004 ◽  
Vol 14 (10) ◽  
pp. 1367-1375 ◽  
Author(s):  
G Wu ◽  
A R Mirza ◽  
S K Gamage ◽  
L Ukrainczyk ◽  
N Shashidhar ◽  
...  
Keyword(s):  
Low Cost ◽  
Optical Mems

A Scalable $1\times N$ Optical MEMS Switch Architecture Utilizing a Microassembled Rotating Micromirror

2007 ◽  
Vol 13 (2) ◽  
pp. 336-347 ◽  
Author(s):  
Mohamed A. Basha ◽  
Nikolai Dechev ◽  
Safieddin Safavi-Naeini ◽  
Sujeet K. Chaudhuri
Keyword(s):  
Optical Mems ◽  
Mems Switch ◽  
Switch Architecture

8CH AWG Multi/Demultiplexer With MEMS Variable Optical Attenuator

2003 ◽  
Author(s):  
K. Ishikawa ◽  
Q. Yu
Keyword(s):  
Wavelength Division Multiplexing ◽  
Optical Signal ◽  
Arrayed Waveguide Grating ◽  
Optical Contrast ◽  
Network Systems ◽  
Micro Electro Mechanical Systems ◽  
Wavelength Division ◽  
Power Intensity ◽  
Variable Optical Attenuator ◽  
Arrayed Waveguide

An integrated arrayed waveguide grating multi/demultiplexer (AWG) with a micro-electro-mechanical systems (MEMS) based variable optical attenuator (VOA) is reported. The device consists of an AWG based on silica and a MEMS-VOA chip. The MEMS chip includes 100 μm × 100 μm polysilicon shutter plates coated with gold and electrostatic comb-drive actuators. The MEMS chip is interposed in a trench located in the middle of the I/O waveguides of the AWG to tune the optical transmitting power intensity through the waveguides continuously. The MEMS-VOA shutters have more than a 10 μm displacement. Using those shutters, 30 dB optical contrast from 5 dB at the transmit state to 35 dB at the isolation state is achieved. The obtained attenuation contrast is greater than that of a conventional waveguide-based Mach-Zehnder interferometer VOA and sufficient to adjust and equalize the optical signal power in the wavelength division multiplexing (WDM) network systems.

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