Characterization of PZT Thin Films by Sol-Gel Method in Application of Resonant Sensor

2008 ◽  
Author(s):  
J. Z. Tsai ◽  
C. J. Chen ◽  
C. W. Hsiao ◽  
D. T Hsieh ◽  
Y. M. Hsin
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
Resonant Sensor

Characterization of PZT thin films prepared by a modified sol–gel method

1999 ◽  
Vol 19 (6-7) ◽  
pp. 1387-1389 ◽  
Author(s):  
Bernd Matthes ◽  
Gerhard Tomandl ◽  
Günter Werner
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Gel Method ◽  
Sol Gel Method

A Study on the Piezoelectric Properties of PZT and Doped PZT Thin Films by Sol-Gel Method

2010 ◽  
Vol 663-665 ◽  
pp. 650-653
Author(s):  
Jin Moo Byun ◽  
Jeong Sun Han ◽  
Jae Hyoung Park ◽  
Seong Eui Lee ◽  
Hee Chul Lee
Keyword(s):  
Thin Films ◽  
Piezoelectric Coefficient ◽  
Energy Harvester ◽  
Sol Gel ◽  
Pure Perovskite Structure ◽  
Pzt Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
Si Substrates ◽  
Pzt Thin Film

This study examined the effect of crystalline orientation and dopants such as Nb and Zn on the piezoelectric coefficient of sol-gel driven Pb1(Zr0.52Ti0.48)O3(PZT) and doped PZT thin films. Crack-free 1-μm-thick PZT and doped PZT thin films prepared by using 2-Methoxyethanol-based sol-gel method were fabricated on Pt/Ti/SiO2/Si substrates. The highly (111) oriented PZT thin films of pure perovskite structure could be obtained by controlling various parameters such as a PbTiO3 seed layer and a concentration of sol-gel solution. The Nb-Zn doped PZT thin films exhibited high piezoelectric coefficient which was about 50 % higher than that of undoped PZT thin film. The highest measured piezoelectric coefficient was 240 pC/N, which could be applicable to piezoelectrically operated MEMS actuator, sensor, or energy harvester devices.

Device effects of various Zr/Ti ratios of PZT thin-films prepared by sol-gel method

1992 ◽  
Vol 1 (2-4) ◽  
pp. 293-304 ◽  
Author(s):  
H. Watanabe ◽  
T. Mihara ◽  
C. A. Paz De Araujo
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Gel Method ◽  
Sol Gel Method

Growth and characterization of β-Ga2O3 thin films by sol-gel method for fast-response solar-blind ultraviolet photodetectors

2018 ◽  
Vol 766 ◽  
pp. 601-608 ◽  
Author(s):  
Hao Shen ◽  
Yinong Yin ◽  
Kun Tian ◽  
Karthikeyan Baskaran ◽  
Libing Duan ◽  
...  
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Fast Response ◽  
Gel Method ◽  
Sol Gel Method ◽  
Solar Blind ◽  
Ultraviolet Photodetectors

Synthesis and characterization of LiCoO2 thin films prepared by the sol–gel method

2011 ◽  
Vol 13 (6) ◽  
pp. 1232-1234 ◽  
Author(s):  
Vaishali Patil ◽  
Arun Patil ◽  
Ji-Won Choi ◽  
Seok-Jin Yoon
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Gel Method ◽  
Sol Gel Method

scholarly journals Growth and Characterization of Indium-Doped Zinc Oxide Thin Films Prepared by Sol-Gel Method

2012 ◽  
Vol 121 (1) ◽  
pp. 217-220 ◽  
Author(s):  
M.S. Kim ◽  
K.G. Yim ◽  
S. Kim ◽  
G. Nam ◽  
D.Y. Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method

Synthesis and characterization of Fe2O3–TiO2 thin films grown by the sol–gel method

2004 ◽  
Vol 1 (S1) ◽  
pp. S116-S120 ◽  
Author(s):  
E. Sánchez-Mora ◽  
E. Gómez-Barojas ◽  
J.M. Gracia-Jiménez ◽  
R. Silva-González ◽  
F. Pérez-Rodríguez
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Tio2 Thin Films ◽  
Gel Method ◽  
Sol Gel Method

Synthesis and characterization of self-assembled c-axis oriented Bi2Sr3Co2Oy thin films by the sol–gel method

2011 ◽  
Vol 40 (37) ◽  
pp. 9544 ◽  
Author(s):  
Xuebin Zhu ◽  
Xianwu Tang ◽  
Dongqi Shi ◽  
Hongbin Jian ◽  
Hechang Lei ◽  
...  
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Gel Method ◽  
Sol Gel Method ◽  
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