15th Annual IEEE Symposium on High-Performance Interconnects - Title

A double focusing magnetic spectrometer has been constructed for use with a field emission electron gun scanning microscope in order to study the electron energy loss mechanism in thin specimens. It is of the uniform field sector type with curved pole pieces. The shape of the pole pieces is determined by requiring that all particles be focused to a point at the image slit (point 1). The resultant shape gives perfect focusing in the median plane (Fig. 1) and first order focusing in the vertical plane (Fig. 2).

Download Full-text

Vacuum System to Minimize the Specimen Contamination of High-Performance EM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100077967 ◽

1977 ◽

Vol 35 ◽

pp. 68-69

Author(s):

N. Yoshimura ◽

K. Shirota ◽

T. Etoh

Keyword(s):

Electron Microscope ◽

High Speed ◽

High Performance ◽

High Vacuum ◽

Vacuum System ◽

Pump System ◽

Pumping System ◽

Diffusion Pump ◽

Almost All ◽

Cascade Type

One of the most important requirements for a high-performance EM, especially an analytical EM using a fine beam probe, is to prevent specimen contamination by providing a clean high vacuum in the vicinity of the specimen. However, in almost all commercial EMs, the pressure in the vicinity of the specimen under observation is usually more than ten times higher than the pressure measured at the punping line. The EM column inevitably requires the use of greased Viton O-rings for fine movement, and specimens and films need to be exchanged frequently and several attachments may also be exchanged. For these reasons, a high speed pumping system, as well as a clean vacuum system, is now required. A newly developed electron microscope, the JEM-100CX features clean high vacuum in the vicinity of the specimen, realized by the use of a CASCADE type diffusion pump system which has been essentially improved over its predeces- sorD employed on the JEM-100C.

Download Full-text

Use of the Magnetostatic Analogue In Electromagnetic Lens Engineering

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100068795 ◽

1970 ◽

Vol 28 ◽

pp. 360-361

Author(s):

John W. Coleman

Keyword(s):

Boundary Conditions ◽

High Performance ◽

Force Fields ◽

Optical Design ◽

Direct Conversion ◽

Design Engineering ◽

Design Data ◽

Scalar Potentials ◽

Geometric Elements ◽

At Will

In the design engineering of high performance electromagnetic lenses, the direct conversion of electron optical design data into drawings for reliable hardware is oftentimes difficult, especially in terms of how to mount parts to each other, how to tolerance dimensions, and how to specify finishes. An answer to this is in the use of magnetostatic analytics, corresponding to boundary conditions for the optical design. With such models, the magnetostatic force on a test pole along the axis may be examined, and in this way one may obtain priority listings for holding dimensions, relieving stresses, etc..The development of magnetostatic models most easily proceeds from the derivation of scalar potentials of separate geometric elements. These potentials can then be conbined at will because of the superposition characteristic of conservative force fields.

Download Full-text