Method of Fabricating Multiple-Frequency Film Bulk Acoustic Resonators in a Single Chip

2006 ◽  
Author(s):  
Li-peng Wang ◽  
Eyal Ginsburg ◽  
Dora Diamant ◽  
Qing Ma ◽  
Zhenyu Huang ◽  
...  
Keyword(s):  
Multiple Frequency ◽  
Single Chip ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators

2008 ◽  
Vol 47 (5) ◽  
pp. 4007-4010 ◽  
Author(s):  
Masanori Ueda ◽  
Motoaki Hara ◽  
Shinji Taniguchi ◽  
Tsuyoshi Yokoyama ◽  
Tokihiro Nishihara ◽  
...  
Keyword(s):  
Air Gap ◽  
Acoustic Resonators ◽  
Band Filter ◽  
X Band ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

scholarly journals High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators

2009 ◽  
Vol 94 (17) ◽  
pp. 172903 ◽  
Author(s):  
N. Yamauchi ◽  
T. Shirai ◽  
T. Yoshihara ◽  
Y. Hayasaki ◽  
T. Ueda ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Resonators ◽  
Piezoelectric Thin Films ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

scholarly journals CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

Sensors ◽  
2010 ◽  
Vol 10 (5) ◽  
pp. 4180-4193 ◽  
Author(s):  
Martin Nirschl ◽  
Arto Rantala ◽  
Kari Tukkiniemi ◽  
Sanna Auer ◽  
Ann-Charlotte Hellgren ◽  
...  
Keyword(s):  
Label Free ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk
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