Design and characterization of micromachined piezoelectric acoustic flexural plate wave devices

Nondestructive Dynamic Characterization of Nanocrystalline Diamond Membranes for Flexural Plate Wave Sensors

IEEE Sensors Journal ◽

10.1109/jsen.2006.877970 ◽

2006 ◽

Vol 6 (4) ◽

pp. 916-923 ◽

Cited By ~ 6

Author(s):

L.A. Francis ◽

A. Kromka ◽

D. Steinmuller-Nethl ◽

P. Bertrand ◽

C. Van Hoof

Keyword(s):

Nanocrystalline Diamond ◽

Dynamic Characterization ◽

Plate Wave ◽

Wave Sensors ◽

Flexural Plate Wave

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Plate Wave Characterization of Stiffness Degradation in Composites During Fatigue

Research in Nondestructive Evaluation ◽

10.1080/09349849808968139 ◽

1998 ◽

Vol 10 (1) ◽

pp. 147-162

Author(s):

J. -R. Shih ◽

A. K. Mai ◽

M. Vemuri

Keyword(s):

Stiffness Degradation ◽

Plate Wave

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Flexural plate-wave sensor: chemical vapor sensing and electrostrictive excitation

10.1109/ultsym.1989.67053 ◽

2003 ◽

Cited By ~ 12

Author(s):

S.W. Wenzel ◽

R.M. White

Keyword(s):

Chemical Vapor ◽

Plate Wave ◽

Vapor Sensing ◽

Flexural Plate Wave ◽

Chemical Vapor Sensing

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All-Polymer Flexural Plate Wave Devices

Technologies for Smart Sensors and Sensor Fusion ◽

10.1201/b16746-8 ◽

2017 ◽

pp. 125-140

Keyword(s):

Plate Wave ◽

Flexural Plate Wave

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Flexural plate wave devices for chemical analysis

Analytical Chemistry ◽

10.1021/ac00015a011 ◽

1991 ◽

Vol 63 (15) ◽

pp. 1552-1561 ◽

Cited By ~ 40

Author(s):

Jay W. Grate ◽

Stuart W. Wenzel ◽

Richard M. White

Keyword(s):

Chemical Analysis ◽

Plate Wave ◽

Flexural Plate Wave

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Aluminium nitride membranes with embedded buried idt electrodes for novel flexural plate wave devices

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2015.7181167 ◽

2015 ◽

Cited By ~ 2

Author(s):

M. Reusch ◽

P. Katus ◽

K. Holc ◽

W. Pletschen ◽

L. Kirste ◽

...

Keyword(s):

Aluminium Nitride ◽

Plate Wave ◽

Flexural Plate Wave

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Pressure sensing with a flexural plate wave resonator

Journal of Applied Physics ◽

10.1063/1.369196 ◽

1999 ◽

Vol 85 (3) ◽

pp. 1998-2000 ◽

Cited By ~ 3

Author(s):

M. A. Butler ◽

M. K. Hill ◽

J. J. Spates ◽

S. J. Martin

Keyword(s):

Pressure Sensing ◽

Plate Wave ◽

Wave Resonator ◽

Flexural Plate Wave

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Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.503.29 ◽

2012 ◽

Vol 503 ◽

pp. 29-34

Author(s):

Ming Xin Xue ◽

Meng Wei Liu ◽

Xin Li ◽

Jun Hong Li

Keyword(s):

Composite Membrane ◽

Rf Magnetron Sputtering ◽

Fabrication Process ◽

Center Frequency ◽

Zno Films ◽

Thin Membrane ◽

Plate Wave ◽

Multilayered Composite ◽

Flexural Plate Wave ◽

Wave Device

The MEMS A0mode Lamb wave (flexural plate wave) ultrasonic devices have been shown to be extremely useful for sensor and actuator applications. The design and fabrication process of a MEMS flexural plate wave device based on the LTO/ZnO/LTO/Si3N4multilayered composite membrane are presented. The flexural plate wave was respectively launched and received by both Al interdigital transducers. In order to reduce the stress of the thin membrane induced mainly by the in-plane compressive stress of ZnO film, two fabrication process of DC and RF magnetron sputtering were used to deposit the ZnO films, respectively. The FPW device based on LTO(0.2μm)/ZnO(1μm)/ LTO(2μm)/Si3N4(0.5μm) thin membrane was fabricated. The center frequency of the MEMS flexural plate wave device is measured at 3.69MHz, which agrees with the theoretical predictions.

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