scholarly journals Electronic scheme for full control of organic piezoelectric MEMS resonators

2016 ◽  
Author(s):  
Pierre-Henri Ducrot ◽  
Isabelle Dufour ◽  
Cedric Ayela ◽  
Fabrice Mathieu ◽  
Liviu Nicu
Keyword(s):  
Full Control ◽  
Mems Resonators ◽  
Piezoelectric Mems

A General Analytical Formulation for the Motional Parameters of Piezoelectric MEMS Resonators

2018 ◽  
Vol 65 (3) ◽  
pp. 476-488 ◽  
Author(s):  
Jonathan M. Puder ◽  
Jeffrey S. Pulskamp ◽  
Ryan Q. Rudy ◽  
Ronald G. Polcawich ◽  
Sunil A. Bhave
Keyword(s):  
Analytical Formulation ◽  
Mems Resonators ◽  
Piezoelectric Mems

Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators

2019 ◽  
Vol 28 (2) ◽  
pp. 209-218 ◽  
Author(s):  
Ruochen Lu ◽  
Ming-Huang Li ◽  
Yansong Yang ◽  
Tomas Manzaneque ◽  
Songbin Gong
Keyword(s):  
Electromechanical Coupling ◽  
Mems Resonators ◽  
Piezoelectric Mems

scholarly journals Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Sensors ◽  
2020 ◽  
Vol 20 (17) ◽  
pp. 4978 ◽  
Author(s):  
Cheng Tu ◽  
Joshua E.-Y. Lee ◽  
Xiao-Sheng Zhang
Keyword(s):  
Integrated Circuit ◽  
High Sensitivity ◽  
Low Noise ◽  
Quality Factors ◽  
Rf Filters ◽  
Resonant Sensors ◽  
Sensing Applications ◽  
Analysis Methods ◽  
Mems Resonators ◽  
Piezoelectric Mems

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators.

Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids

2019 ◽  
Vol 295 ◽  
pp. 84-92 ◽  
Author(s):  
Georg Pfusterschmied ◽  
Florian Patocka ◽  
Christoph Weinmann ◽  
Michael Schneider ◽  
Daniel Platz ◽  
...  
Keyword(s):  
Higher Order ◽  
Higher Order Modes ◽  
Mems Resonators ◽  
Piezoelectric Mems

Temperature-Stable Piezoelectric MEMS Resonators Using Integrated Ovens and Simple Resistive Feedback Circuits

2017 ◽  
Vol 26 (1) ◽  
pp. 187-195 ◽  
Author(s):  
Changting Xu ◽  
Jeronimo Segovia-Fernandez ◽  
Hoe Joon Kim ◽  
Gianluca Piazza
Keyword(s):  
Mems Resonators ◽  
Resistive Feedback ◽  
Feedback Circuits ◽  
Piezoelectric Mems
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