Anchor loss reduction in ALN Lamb wave resonators using phononic crystal strip tethers

2014 ◽  
Author(s):  
Chih-Ming Lin ◽  
Jin-Chen Hsu ◽  
Debbie G. Senesky ◽  
Albert P. Pisano
Keyword(s):  
Lamb Wave ◽  
Phononic Crystal ◽  
Loss Reduction ◽  
Anchor Loss

scholarly journals Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 62
Author(s):  
Yinjie Tong ◽  
Tao Han
Keyword(s):  
Lamb Wave ◽  
High Frequency ◽  
Transmission Loss ◽  
Mechanical Energy ◽  
Phononic Crystal ◽  
Center Frequency ◽  
Electromechanical Coupling Coefficient ◽  
Wave Resonator ◽  
Energy Leakage ◽  
Anchor Loss

Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (k2) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.

Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator

2018 ◽  
Vol 11 (6) ◽  
pp. 067201 ◽  
Author(s):  
Fei-Hong Bao ◽  
Lei-Lei Bao ◽  
Xin-Yi Li ◽  
Muhammad Ammar Khan ◽  
Hua-Ye Wu ◽  
...  
Keyword(s):  
Thin Film ◽  
Crystal Structure ◽  
Phononic Crystal ◽  
Loss Reduction ◽  
Microelectromechanical System ◽  
Multi Stage ◽  
Anchor Loss

Lamb wave band gaps in locally resonant phononic crystal strip waveguides

2012 ◽  
Vol 376 (4) ◽  
pp. 579-583 ◽  
Author(s):  
Yuanwei Yao ◽  
Fugen Wu ◽  
Xin Zhang ◽  
Zhilin Hou
Keyword(s):  
Lamb Wave ◽  
Phononic Crystal ◽  
Band Gaps ◽  
Wave Band
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