Fine pitch copper wire bonding on 45nm tech Cu/low-k chip with different bond pad metallurgy

2011 ◽  
Author(s):  
Leong Ching Wai ◽  
Norhanani Binte Jaafar ◽  
Michelle Chew ◽  
Sivakumar ◽  
Gunasekaran ◽  
...  
Keyword(s):  
Copper Wire ◽  
Wire Bonding ◽  
Fine Pitch ◽  
Copper Wire Bonding ◽  
Low K

Reliability Results of 0.8 mil Fine Pitch Copper wire bonding on Immersion Gold Plated Pad for Copper Low-k Devices

2008 ◽  
Author(s):  
Leong Ching Wai ◽  
Xiaowu Zhang ◽  
V. Kripesh ◽  
C. S. Premachandran ◽  
S.C. Chong ◽  
...  
Keyword(s):  
Copper Wire ◽  
Wire Bonding ◽  
Fine Pitch ◽  
Copper Wire Bonding ◽  
Low K

Fine Pitch Cu Wire Bonding – As Good As Gold

2010 ◽  
Vol 2010 (1) ◽  
pp. 000650-000655
Author(s):  
Bernd K. Appelt ◽  
William T. Chen ◽  
Andy Tseng ◽  
Yi-Shao Lai
Keyword(s):  
Raw Materials ◽  
Copper Wire ◽  
Commodity Prices ◽  
Gold Wire ◽  
Wire Bonding ◽  
Fine Pitch ◽  
Methodical Approach ◽  
Copper Wire Bonding ◽  
Gold Wires ◽  
The Impact

Fine pitch wire bonding has traditionally been the domain of gold wires. The significant increase in gold commodity prices has driven a continuous reduction in wire diameters to minimize the impact of the raw materials cost of the wire. This has reached a point now where copper wires are beginning to displace gold wires despite the technical challenges associated with copper wires. The basic challenges like propensity for oxidation, hardness and propensity for corrosion can be managed with the appropriate investment in tooling and infrastructure. Doubts are persisting about yield and reliability. With a very methodical approach to developing the process controls, it can be demonstrated that yields are as good as those for gold despite the fact that copper bonds are not reworkable. Likewise, the typical JEDEC reliability tests can be full filled. Here, an extensive effort has been placed on extended JEDEC testing to demonstrate that with good process control and proper materials choices, test durations of more than 2x can be passed. This excellent performance demonstrates that copper wire bonding can be as good as or better than gold wire bonding.

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