Fabrication of Die Embedded Substrate and Mechanical Stress Evaluation at Active Area of the Embedded Die

2008 ◽  
Author(s):  
Doohwan Lee ◽  
Seunggu Kim ◽  
Moonil Kim ◽  
Onecheol Bae ◽  
Kwankyu Kim ◽  
...  
Keyword(s):  
Mechanical Stress ◽  
Active Area ◽  
Stress Evaluation

Micro-Raman Spectroscopy Evaluation of the Local Mechanical Stress in Shallow Trench Isolation CMOS Structures: Correlation with Defect Generation and Diode Leakage

1998 ◽  
Author(s):  
I. De Wolf ◽  
G. Groeseneken ◽  
H.E. Maes ◽  
M. Bolt ◽  
K. Barla ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Mechanical Stress ◽  
Defect Formation ◽  
Active Area ◽  
Wet Oxidation ◽  
Leakage Currents ◽  
Shallow Trench Isolation ◽  
Micro Raman Spectroscopy ◽  
Silicon Devices ◽  
Trench Isolation

Abstract It is shown, using micro-Raman spectroscopy, that Shallow Trench Isolation introduces high stresses in the active area of silicon devices when wet oxidation steps are used. These stresses result in defect formation in the active area, leading to high diode leakage currents. The stress levels are highest near the outer edges of line structures and at square structures. They also increase with decreasing active area dimensions.

1758 Three Dimensional Meso-Mechanical Stress Evaluation of Mode I crack in Long Fiber Reinforced Composits

2005 ◽  
Vol 2005.1 (0) ◽  
pp. 419-420
Author(s):  
Hideki NIIMI ◽  
Hirohisa KIMACHI ◽  
Tomohisa NAKAYAMA ◽  
Keisuke TANAKA
Keyword(s):  
Mechanical Stress ◽  
Three Dimensional ◽  
Mode I ◽  
Mode I Crack ◽  
Fiber Reinforced ◽  
Stress Evaluation

Mechanical stress evaluation of steel utilizing its magnetic properties: an inverse problem approach

2004 ◽  
Vol 272-276 ◽  
pp. E535-E537
Author(s):  
Lode Vandenbossche ◽  
Luc Dupré ◽  
Marc De Wulf ◽  
Jan Melkebeek
Keyword(s):  
Inverse Problem ◽  
Magnetic Properties ◽  
Mechanical Stress ◽  
Stress Evaluation

Behaviour of Ni-Mn-Ga alloys under mechanical stress

2003 ◽  
Vol 112 ◽  
pp. 943-946 ◽  
Author(s):  
K. Koho ◽  
J. Vimpari ◽  
L. Straka ◽  
N. Lanska ◽  
O. Sôderberg ◽  
...  
Keyword(s):  
Mechanical Stress
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