Identification and control of precision XY stages with active vibration suppression system
Keyword(s):
2018 ◽
Vol 2018
(0)
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pp. J1010204
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2006 ◽
Vol 129
(1)
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pp. 84-93
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1999 ◽
Vol 10
(11)
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pp. 914-919
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Keyword(s):
2019 ◽
Vol 85
(878)
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pp. 19-00161-19-00161
2008 ◽
Vol 222
(3)
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pp. 357-364
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