Use of MeV ion implantations for isolation of GaAs and InP-based HBTs

The 11th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications, 2003. EDMO 2003. ◽

10.1109/edmo.2003.1260014 ◽

2004 ◽

Author(s):

A.A. Rezazadeh

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