The high quality low temperature oxidation technology in a quasi self-aligned SiGe HBT
Keyword(s):
Sige Hbt
◽
2004 ◽
Vol 229
(1-4)
◽
pp. 311-315
◽
Keyword(s):
2009 ◽
Keyword(s):
2007 ◽
Vol 42
(12)
◽
pp. 4684-4691
◽
2017 ◽
Vol 36
(1)
◽
pp. 365-372
◽
Keyword(s):
2015 ◽
Vol 56
(3)
◽
pp. 379-385
◽