Nondestructive, In Situ Mapping of Die Surface Displacements in Encapsulated IC Chip Packages Using X-Ray Diffraction Imaging Techniques

2017 ◽  
Author(s):  
N. E. Gorji ◽  
B. K. Tanner ◽  
R. K. Vijayaraghavan ◽  
A. N. Danilewsky ◽  
P. J. McNally
Keyword(s):  
Imaging Techniques ◽  
X Ray Diffraction ◽  
X Ray ◽  
Surface Displacements ◽  
Die Surface ◽  
Diffraction Imaging

Full-field X-ray diffraction microscopy using polymeric compound refractive lenses

2014 ◽  
Vol 47 (6) ◽  
pp. 1882-1888 ◽  
Author(s):  
J. Hilhorst ◽  
F. Marschall ◽  
T. N. Tran Thi ◽  
A. Last ◽  
T. U. Schülli
Keyword(s):  
Imaging Techniques ◽  
Light And Electron Microscopy ◽  
Added Value ◽  
Acquisition Time ◽  
Imaging Method ◽  
X Ray Diffraction ◽  
Polymeric Compound ◽  
Full Field ◽  
X Ray ◽  
Diffraction Imaging

Diffraction imaging is the science of imaging samples under diffraction conditions. Diffraction imaging techniques are well established in visible light and electron microscopy, and have also been widely employed in X-ray science in the form of X-ray topography. Over the past two decades, interest in X-ray diffraction imaging has taken flight and resulted in a wide variety of methods. This article discusses a new full-field imaging method, which uses polymer compound refractive lenses as a microscope objective to capture a diffracted X-ray beam coming from a large illuminated area on a sample. This produces an image of the diffracting parts of the sample on a camera. It is shown that this technique has added value in the field, owing to its high imaging speed, while being competitive in resolution and level of detail of obtained information. Using a model sample, it is shown that lattice tilts and strain in single crystals can be resolved simultaneously down to 10−3° and Δa/a= 10−5, respectively, with submicrometre resolution over an area of 100 × 100 µm and a total image acquisition time of less than 60 s.

scholarly journals Cryogenic Coherent X-ray Diffraction Imaging Techniques for Structural Analyses of Biological Cells and Cellular Organelles

2018 ◽  
Vol 24 (S2) ◽  
pp. 14-15
Author(s):  
Amane Kobayashi ◽  
Yuki Takayama ◽  
Tomotaka Oroguchi ◽  
Koji Okajima ◽  
Mao Oide ◽  
...  
Keyword(s):  
Imaging Techniques ◽  
Biological Cells ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Imaging ◽  
Cellular Organelles

scholarly journals Annealing of focused ion beam damage in gold microcrystals: an in situ Bragg coherent X-ray diffraction imaging study

2021 ◽  
Vol 28 (2) ◽  
pp. 550-565 ◽  
Author(s):  
David Yang ◽  
Nicholas W. Phillips ◽  
Kay Song ◽  
Ross J. Harder ◽  
Wonsuk Cha ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Imaging Study ◽  
X Ray Diffraction ◽  
Multiple Reflections ◽  
X Ray ◽  
Self Diffusion ◽  
Diffraction Imaging ◽  
Gold Microcrystals

Focused ion beam (FIB) techniques are commonly used to machine, analyse and image materials at the micro- and nanoscale. However, FIB modifies the integrity of the sample by creating defects that cause lattice distortions. Methods have been developed to reduce FIB-induced strain; however, these protocols need to be evaluated for their effectiveness. Here, non-destructive Bragg coherent X-ray diffraction imaging is used to study the in situ annealing of FIB-milled gold microcrystals. Two non-collinear reflections are simultaneously measured for two different crystals during a single annealing cycle, demonstrating the ability to reliably track the location of multiple Bragg peaks during thermal annealing. The thermal lattice expansion of each crystal is used to calculate the local temperature. This is compared with thermocouple readings, which are shown to be substantially affected by thermal resistance. To evaluate the annealing process, each reflection is analysed by considering facet area evolution, cross-correlation maps of the displacement field and binarized morphology, and average strain plots. The crystal's strain and morphology evolve with increasing temperature, which is likely to be caused by the diffusion of gallium in gold below ∼280°C and the self-diffusion of gold above ∼280°C. The majority of FIB-induced strains are removed by 380–410°C, depending on which reflection is being considered. These observations highlight the importance of measuring multiple reflections to unambiguously interpret material behaviour.

Toward in situ x-ray diffraction imaging at the nanometer scale

2008 ◽  
Author(s):  
Nadia A. Zatsepin ◽  
Ruben A. Dilanian ◽  
Andrei Y. Nikulin ◽  
Brian M. Gable ◽  
Barry C. Muddle ◽  
...  
Keyword(s):  
Nanometer Scale ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Imaging

Dislocation sources and slip band nucleation from indents on silicon wafers

2010 ◽  
Vol 43 (5) ◽  
pp. 1036-1039 ◽  
Author(s):  
J. Wittge ◽  
A. N. Danilewsky ◽  
D. Allen ◽  
P. McNally ◽  
Z. Li ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Slip Band ◽  
Rapid Thermal Annealing ◽  
Line Tension ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Imaging ◽  
Dislocation Sources ◽  
Nucleation Of Dislocations

The nucleation of dislocations at controlled indents in silicon during rapid thermal annealing has been studied byin situX-ray diffraction imaging (topography). Concentric loops extending over pairs of inclined {111} planes were formed, the velocities of the inclined and parallel segments being almost equal. Following loss of the screw segment from the wafer, the velocity of the inclined segments almost doubled, owing to removal of the line tension of the screw segments. The loops acted as obstacles to slip band propagation.

Real‐time X‐ray diffraction imaging for semiconductor wafer metrology and high temperature in situ experiments

2011 ◽  
Vol 208 (11) ◽  
pp. 2499-2504 ◽  
Author(s):  
A. N. Danilewsky ◽  
J. Wittge ◽  
A. Hess ◽  
A. Cröll ◽  
A. Rack ◽  
...  
Keyword(s):  
High Temperature ◽  
Real Time ◽  
X Ray Diffraction ◽  
Semiconductor Wafer ◽  
X Ray ◽  
In Situ Experiments ◽  
Diffraction Imaging

Atmospheric coherent X-ray diffraction imaging for in situ structural analysis at SPring-8 Hyogo beamline BL24XU

2018 ◽  
Vol 25 (4) ◽  
pp. 1229-1237
Author(s):  
Yuki Takayama ◽  
Yuki Takami ◽  
Keizo Fukuda ◽  
Takamasa Miyagawa ◽  
Yasushi Kagoshima
Keyword(s):  
Structural Analysis ◽  
Control Device ◽  
Photon Flux ◽  
X Rays ◽  
Atmospheric Conditions ◽  
X Ray Diffraction ◽  
Macroporous Silica ◽  
X Ray ◽  
Diffraction Imaging

Coherent X-ray diffraction imaging (CXDI) is a promising technique for non-destructive structural analysis of micrometre-sized non-crystalline samples at nanometre resolutions. This article describes an atmospheric CXDI system developed at SPring-8 Hyogo beamline BL24XU for in situ structural analysis and designed for experiments at a photon energy of 8 keV. This relatively high X-ray energy enables experiments to be conducted under ambient atmospheric conditions, which is advantageous for the visualization of samples in native states. The illumination condition with pinhole-slit optics is optimized according to wave propagation calculations based on the Fresnel–Kirchhoff diffraction formula so that the sample is irradiated by X-rays with a plane wavefront and high photon flux of ∼1 × 1010 photons/16 µmø(FWHM)/s. This work demonstrates the imaging performance of the atmospheric CXDI system by visualizing internal voids of sub-micrometre-sized colloidal gold particles at a resolution of 29.1 nm. A CXDI experiment with a single macroporous silica particle under controlled humidity was also performed by installing a home-made humidity control device in the system. The in situ observation of changes in diffraction patterns according to humidity variation and reconstruction of projected electron-density maps at 5.2% RH (relative humidity) and 82.6% RH at resolutions of 133 and 217 nm, respectively, were accomplished.

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