High-Frequency Acoustic Microscopy Studies of Buried Interfaces in Silicon

2006 ◽  
Author(s):  
S. Ramanathan ◽  
J.E. Semmens ◽  
L.W. Kessler
Keyword(s):  
High Frequency ◽  
Acoustic Microscopy ◽  
Buried Interfaces

High Frequency Acoustic Microscopy for the Determination of Porosity and Young’s Modulus in High Burnup Uranium Dioxide Nuclear Fuel

2016 ◽  
Vol 63 (3) ◽  
pp. 1520-1525 ◽  
Author(s):  
Mara Marchetti ◽  
Didier Laux ◽  
Fabiola Cappia ◽  
M. Laurie ◽  
P. Van Uffelen ◽  
...  
Keyword(s):  
Young’S Modulus ◽  
Nuclear Fuel ◽  
Uranium Dioxide ◽  
High Frequency ◽  
Young's Modulus ◽  
Acoustic Microscopy ◽  
High Burnup

High-resolution picosecond acoustic microscopy for non-invasive characterization of buried interfaces

2006 ◽  
Vol 21 (5) ◽  
pp. 1204-1208 ◽  
Author(s):  
Shriram Ramanathan ◽  
David G. Cahill
Keyword(s):  
High Resolution ◽  
Spatial Resolution ◽  
Integrated Circuit ◽  
Acoustic Waves ◽  
Spot Size ◽  
Acoustic Microscopy ◽  
Microscopy Technique ◽  
Fundamental Limitations ◽  
Buried Interfaces ◽  
Advanced Packaging

Non-destructive investigation of buried interfaces at high-resolution is critical for integrated circuit and advanced packaging research and development. In this letter, we present a novel non-contact microscopy technique using ultrahigh frequency (GHz range) longitudinal acoustic pulses to form images of interfaces and layers buried deep inside a silicon device. This method overcomes fundamental limitations of conventional scanning acoustic microscopy by directly generating and detecting the acoustic waves on the surface of the sample using an ultrafast pump-probe optical technique. We demonstrate our method by imaging copper lines buried beneath a 6-μm silicon wafer; the lateral spatial resolution of 3 μm is limited by the laser spot size. In addition to the high lateral spatial resolution, the technique has picosecond (ps) time resolution and therefore will enable imaging individual interconnect layers in multi-layer stacked devices.

Determination of Sound Velocities by High Frequency ComplexV(z) Measurement in Acoustic Microscopy

1992 ◽  
Vol 31 (S1) ◽  
pp. 160 ◽  
Author(s):  
Tomio Endo ◽  
Yasuo Sasaki ◽  
Takeshi Yamagishi ◽  
Mitsugu Sakai
Keyword(s):  
High Frequency ◽  
Acoustic Microscopy ◽  
Sound Velocities
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