Post-fabrication soft trimming of resistive sensors

2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) ◽

10.1109/dtip.2018.8394221 ◽

2018 ◽

Author(s):

Ibrahim Shankhour ◽

Jad Mohdad ◽

Frederick Mailly ◽

Pascal Nouet

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