Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators

2017 ◽  
Author(s):  
Barnaby Portelli ◽  
Russell Farrugia ◽  
Ivan Grech ◽  
Owen Casha ◽  
Joseph Micallef ◽  
...  
Keyword(s):  
Measurement Techniques ◽  
Capacitance Measurement ◽  
Comb Drive

Back-End-of-Line Quadrature-Clocked Voltage-Dependent Capacitance Measurements

2009 ◽  
Author(s):  
Stas Polonsky ◽  
Paul Solomon ◽  
Mark Ketchen ◽  
Ernesto Shiling ◽  
Laertis Economikos ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Measurement Techniques ◽  
Test Structure ◽  
Capacitance Measurement ◽  
Analog Design ◽  
Capacitance Measurements ◽  
Front End ◽  
Metal Pattern ◽  
Voltage Dependent ◽  
Dc Current

Abstract We compare different dc current-based integrated capacitance measurement techniques in terms of their applicability to modern CMOS technologies. The winning approach uses quadrature detection to measure mutual Front-End-Of-Line (FEOL) and Back-End-Of-Line (BEOL) capacitances. We describe our implementation of this approach, Quadrature-clocked Voltage-dependent Capacitance Measurements (QVCM), and its application to 45 nm node BEOL: wire capacitance variability measurements for analog design, and capacitive test structure to measure the effect of metal pattern density on Chemical-Mechanical Polishing (CMP) and Reactive Ion Etching (RIE).

Underfill Encapsulant Flow Measured using Capacitance Measurement Techniques

2001 ◽  
Vol 682 ◽  
Author(s):  
T. E. Driscoll ◽  
G. L. Lehmann ◽  
E. J. Cotts
Keyword(s):  
Flow Behavior ◽  
Functional Dependence ◽  
Scaling Law ◽  
Measurement Techniques ◽  
Infiltration Rate ◽  
Capacitance Measurement ◽  
Capillary Flows ◽  
Front Position ◽  
Parallel Surfaces ◽  
Underfill Encapsulant

ABSTRACTCapillary flows of dense, model suspensions and industrial underfill encapsulants are investigated. Flow behavior is characterized by measuring the infiltration rate of an encapsulant or model suspension into a channel formed by parallel surfaces. A capacitance measurement technique is used to track the advancement of the front. Significantly this technique allows the channel surfaces to be formed from opaque materials such as those that found in the principal industrial application of electronics packaging. A scaling law to describe the functional dependence of the front position on channel spacing, surface tension and viscosity is presented.

Reference Coordinate System Requirements for Geophysics

1975 ◽  
Vol 26 ◽  
pp. 87-92
Author(s):  
P. L. Bender
Keyword(s):  
Coordinate System ◽  
Polar Motion ◽  
Main Part ◽  
Measurement Techniques ◽  
Reference Points ◽  
Angular Motion ◽  
Coordinate Systems ◽  
Axis Of Rotation ◽  
The Earth ◽  
Fixed System

AbstractFive important geodynamical quantities which are closely linked are: 1) motions of points on the Earth’s surface; 2)polar motion; 3) changes in UT1-UTC; 4) nutation; and 5) motion of the geocenter. For each of these we expect to achieve measurements in the near future which have an accuracy of 1 to 3 cm or 0.3 to 1 milliarcsec.From a metrological point of view, one can say simply: “Measure each quantity against whichever coordinate system you can make the most accurate measurements with respect to”. I believe that this statement should serve as a guiding principle for the recommendations of the colloquium. However, it also is important that the coordinate systems help to provide a clear separation between the different phenomena of interest, and correspond closely to the conceptual definitions in terms of which geophysicists think about the phenomena.In any discussion of angular motion in space, both a “body-fixed” system and a “space-fixed” system are used. Some relevant types of coordinate systems, reference directions, or reference points which have been considered are: 1) celestial systems based on optical star catalogs, distant galaxies, radio source catalogs, or the Moon and inner planets; 2) the Earth’s axis of rotation, which defines a line through the Earth as well as a celestial reference direction; 3) the geocenter; and 4) “quasi-Earth-fixed” coordinate systems.When a geophysicists discusses UT1 and polar motion, he usually is thinking of the angular motion of the main part of the mantle with respect to an inertial frame and to the direction of the spin axis. Since the velocities of relative motion in most of the mantle are expectd to be extremely small, even if “substantial” deep convection is occurring, the conceptual “quasi-Earth-fixed” reference frame seems well defined. Methods for realizing a close approximation to this frame fortunately exist. Hopefully, this colloquium will recommend procedures for establishing and maintaining such a system for use in geodynamics. Motion of points on the Earth’s surface and of the geocenter can be measured against such a system with the full accuracy of the new techniques.The situation with respect to celestial reference frames is different. The various measurement techniques give changes in the orientation of the Earth, relative to different systems, so that we would like to know the relative motions of the systems in order to compare the results. However, there does not appear to be a need for defining any new system. Subjective figures of merit for the various system dependon both the accuracy with which measurements can be made against them and the degree to which they can be related to inertial systems.The main coordinate system requirement related to the 5 geodynamic quantities discussed in this talk is thus for the establishment and maintenance of a “quasi-Earth-fixed” coordinate system which closely approximates the motion of the main part of the mantle. Changes in the orientation of this system with respect to the various celestial systems can be determined by both the new and the conventional techniques, provided that some knowledge of changes in the local vertical is available. Changes in the axis of rotation and in the geocenter with respect to this system also can be obtained, as well as measurements of nutation.

Electron microscopy of niobium and tantalum hydrides

1978 ◽  
Vol 36 (1) ◽  
pp. 644-645
Author(s):  
T. Schober
Keyword(s):  
Electron Microscopy ◽  
Heat Storage ◽  
Measurement Techniques ◽  
Metal Hydrides ◽  
Detailed Understanding ◽  
Storage Devices ◽  
Unit Cells ◽  
Endothermic Reactions ◽  
Hydrogen Reactions ◽  
New Phase

Nb, Ta and V are prototype substances for the study of the endothermic reactions of H with metals. Such metal-hydrogen reactions have gained increased importance due to the application of metal-hydrides in hydrogen- und heat storage devices. Electron microscopy and diffraction were demonstrated to be excellent methods in the study of hydride morphologies and structures (1). - Figures 1 and 2 show the NbH and TaH phase diagrams (2,3,4). EM techniques have contributed substantially to the elucidation of the structures and domain configurations of phases β, ζ and ε (1,4). Precision length measurement techniques of distances in reciprocal space (5) recently led to a detailed understanding of the distortions of the unit cells of phases ζ and ε (4). In the same work (4) the existence of the new phase η was shown. It is stable near -68 °C. The sequence of transitions is thus below 70 %.

Legal Update: North Dakota Supreme Court: Third Edition of Guides is “Most Current”

1999 ◽  
Vol 4 (1) ◽  
pp. 6-7
Author(s):  
James J. Mangraviti
Keyword(s):  
Internal Rotation ◽  
External Rotation ◽  
Measurement Techniques ◽  
Fourth Edition ◽  
Hip Motion ◽  
The Difference ◽  
The Right ◽  
Hip Flexion ◽  
Hip Rotation ◽  
Hip Extension

Abstract The accurate measurement of hip motion is critical when one rates impairments of this joint, makes an initial diagnosis, assesses progression over time, and evaluates treatment outcome. The hip permits all motions typical of a ball-and-socket joint. The hip sacrifices some motion but gains stability and strength. Figures 52 to 54 in AMA Guides to the Evaluation of Permanent Impairment (AMA Guides), Fourth Edition, illustrate techniques for measuring hip flexion, loss of extension, abduction, adduction, and external and internal rotation. Figure 53 in the AMA Guides, Fourth Edition, illustrates neutral, abducted, and adducted positions of the hip and proper alignment of the goniometer arms, and Figure 52 illustrates use of a goniometer to measure flexion of the right hip. In terms of impairment rating, hip extension (at least any beyond neutral) is irrelevant, and the AMA Guides contains no figures describing its measurement. Figure 54, Measuring Internal and External Hip Rotation, demonstrates proper positioning and measurement techniques for rotary movements of this joint. The difference between measured and actual hip rotation probably is minimal and is irrelevant for impairment rating. The normal internal rotation varies from 30° to 40°, and the external rotation ranges from 40° to 60°.

Eye-movement measurement techniques.

1975 ◽  
Vol 30 (3) ◽  
pp. 315-330 ◽  
Author(s):  
Laurence R. Young ◽  
David Sheena
Keyword(s):  
Eye Movement ◽  
Measurement Techniques

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner
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