scholarly journals Porous alumina based capacitive MEMS RH sensor

2008 ◽  
Author(s):  
Laszlo Juhasz ◽  
Andras Vass-Vamai ◽  
Veronika Timar-Horvath ◽  
Marc P.Y. Desmulliez ◽  
Resh S. Dhariwal
Keyword(s):  
Porous Alumina ◽  
Capacitive Mems

Porous Alumina Ceramic Prepared by HEMA-TBA Gelcasting System

2017 ◽  
Vol 32 (7) ◽  
pp. 731 ◽  
Author(s):  
XIE Yu-Zhou ◽  
PENG Chao-Qun ◽  
WANG Xiao-Feng ◽  
WANG Ri-Chu ◽  
LUO Feng
Keyword(s):  
Porous Alumina ◽  
Alumina Ceramic

Catalytic wet air oxidation of dyeing and printing wastewater

1997 ◽  
Vol 35 (4) ◽  
pp. 311-319 ◽  
Author(s):  
L. Lei ◽  
X. Hu ◽  
H. P. Chu ◽  
G. Chen ◽  
P. L. Yue
Keyword(s):  
High Pressure ◽  
Reaction Time ◽  
Textile Industry ◽  
Porous Alumina ◽  
Supported Catalyst ◽  
Metal Salts ◽  
Treated Wastewater ◽  
Catalytic Wet Air Oxidation ◽  
Air Oxidation ◽  
Wet Air Oxidation

The treatment of dyeing and printing wastewater from the textile industry by oxidation was studied. The reaction was carried out in a two-litre high pressure reactor. In order to promote the oxidation of organic pollutants present in the wastewater, experiments were conducted using various catalysts including metal salts, metal oxides, and porous alumina supported metals. All catalysts tested were able to enhance the conversion of organic compounds in wastewater, shorten the reaction time, and lower the reaction temperature. The alumina supported catalyst has an advantage over other catalysts in that it can be easily separated from the treated wastewater by filtration and recycled. The conditions in preparing the catalyst supported by porous alumina were experimentally optimised.

A high-resolution area-change-based capacitive MEMS tilt sensor

2020 ◽  
Vol 313 ◽  
pp. 112191
Author(s):  
Kang Rao ◽  
Huafeng Liu ◽  
Xiaoli Wei ◽  
Wenjie Wu ◽  
Chenyuan Hu ◽  
...  
Keyword(s):  
High Resolution ◽  
Area Change ◽  
Tilt Sensor ◽  
Capacitive Mems

Preparation of near net size porous alumina‐calcium aluminate ceramics by gelcasting‐pore‐forming agent processs

2020 ◽  
Vol 103 (8) ◽  
pp. 4602-4610
Author(s):  
Bian‐Lei Hao ◽  
Ying Lang ◽  
Da‐Qian Bian ◽  
Chang‐An Wang
Keyword(s):  
Calcium Aluminate ◽  
Porous Alumina

scholarly journals Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2566
Author(s):  
Boris A. Boom ◽  
Alessandro Bertolini ◽  
Eric Hennes ◽  
Johannes F. J. van den Brand
Keyword(s):  
Flow Regime ◽  
Gas Diffusion ◽  
Diffusion Time ◽  
Molecular Flow ◽  
Free Molecular Flow ◽  
Simple Analytical Model ◽  
Gas Damping ◽  
Wide Range ◽  
Capacitive Mems ◽  
Insight Into

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures.

Joining of Porous Alumina with a CaO-Al2 O3 -SiO2 Glass-Ceramic

2013 ◽  
Vol 96 (6) ◽  
pp. 1738-1744 ◽  
Author(s):  
Weiwei Zhu ◽  
Jichun Chen ◽  
Chunhai Jiang ◽  
Chuanyong Hao ◽  
Jinsong Zhang
Keyword(s):  
Glass Ceramic ◽  
Porous Alumina ◽  
Sio2 Glass
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