Modeling, Filtering and Optimization for AFM Arrays

2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS ◽

10.1109/dmems.2012.15 ◽

2012 ◽

Author(s):

H. Hui ◽

Y. Yakoubi ◽

M. Lenczner ◽

S. Cogan ◽

A. Meister ◽

...

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