Minimisation of P surface segregation during epitaxial silicon growth for the fabrication of a silicon-based quantum computer
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2007 ◽
1979 ◽
Keyword(s):
2005 ◽
Vol 77
(2)
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pp. 201-222
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2005 ◽
Vol 03
(supp01)
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pp. 27-40
◽
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