High-performance, widely tunable, single-mode, mid-infrared distributed feedback quantum cascade lasers

1998 ◽  
Author(s):  
F. Capasso ◽  
C. Gmachl ◽  
A.L. Hutchinson ◽  
A. Tredicucci ◽  
J. Faist ◽  
...  
Keyword(s):  
High Performance ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Distributed Feedback ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Cascade Lasers

Processing of deeply etched GaAs/AlGaAs quantum cascade lasers with grating structures

2004 ◽  
Vol 829 ◽  
Author(s):  
S. Golka ◽  
M. Austerer ◽  
C. Pflügl ◽  
W. Schrenk ◽  
G. Strasser
Keyword(s):  
Coupling Coefficient ◽  
Inductively Coupled Plasma ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Grating Coupling ◽  
Cascade Lasers

ABSTRACTGratings in GaAs/AlGaAs mid-infrared quantum cascade lasers (QCLs) are fabricated with a structure depth of more than 10 μm. A N2/SiCl4 inductively coupled plasma reactive ion etching (ICP-RIE) process was employed to achieve extremely smooth sidewalls and selectivities to the SiNX etch mask of up to 70:1. EDX spectra measured on as-etched samples show that sidewall etch inhibition is caused by a thin Si containing layer on the sidewalls that is formed simultaneously with ICP etching of GaAs at the bottom of the trenches. To demonstrate device application gratings with a pitch of 1.72 μm are applied to long rib waveguide -based QCLs emitting at λ = 10.7 μm. When etched laterally together with the rib the grating gives rise to stable single mode emission up to 295K from these QCLs. The respective grating coupling coefficient is determined to be κ = 29 cm-1.

Single-mode, tunable distributed-feedback and multiple-wavelength quantum cascade lasers

2002 ◽  
Vol 38 (6) ◽  
pp. 569-581 ◽  
Author(s):  
C. Gmachl ◽  
A. Straub ◽  
R. Colombelli ◽  
F. Capasso ◽  
D.L. Sivco ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Distributed Feedback ◽  
Quantum Cascade ◽  
Multiple Wavelength ◽  
Cascade Lasers

Pulse Wavelength Scan of Room-Temperature Mid-Infrared Distributed Feedback Quantum Cascade Lasers for N 2 O Gas Detection

2006 ◽  
Vol 23 (7) ◽  
pp. 1780-1783 ◽  
Author(s):  
Zhang Yong-Gang ◽  
Xu Gang-Yi ◽  
Li Ai-Zhen ◽  
Li Yao-Yao ◽  
Gu Yi ◽  
...  
Keyword(s):  
Room Temperature ◽  
Quantum Cascade Lasers ◽  
Distributed Feedback ◽  
Gas Detection ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Cascade Lasers

High-performance distributed feedback quantum cascade lasers grown by metalorganic vapor phase epitaxy

2004 ◽  
Vol 85 (23) ◽  
pp. 5529-5531 ◽  
Author(s):  
R. P. Green ◽  
L. R. Wilson ◽  
E. A. Zibik ◽  
D. G. Revin ◽  
J. W. Cockburn ◽  
...  
Keyword(s):  
Vapor Phase ◽  
High Performance ◽  
Quantum Cascade Lasers ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Distributed Feedback ◽  
Quantum Cascade ◽  
Cascade Lasers

Optimization Of InP-Based Waveguides For High-Performance Mid-Infrared Quantum Cascade Lasers

2007 ◽  
Author(s):  
Oana Malis ◽  
Deborah L. Sivco ◽  
Jianxin Chen ◽  
Liming Zhang ◽  
A. Michael Sergent ◽  
...  
Keyword(s):  
High Performance ◽  
Quantum Cascade Lasers ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Cascade Lasers
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