Defect Classification Algorithm for IC Photomask Based on PCA and SVM

Author(s):  
Shizhe Chen ◽  
Tao Hu ◽  
Guodong Liu ◽  
Zhaobang Pu ◽  
Min Li ◽  
...  
2021 ◽  
Author(s):  
Yinghui Kong ◽  
Xu Liu ◽  
Zhenbing Zhao ◽  
Dongxia Zhang ◽  
Jikun Duan

2020 ◽  
Vol 57 (24) ◽  
pp. 241011
Author(s):  
苏泽斌 Su Zebin ◽  
高敏 Gao Min ◽  
李鹏飞 Li Pengfei ◽  
景军锋 Jing Junfeng ◽  
张缓缓 Zhang Huanhuan

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