Simulation study of Robust H¿ Control system for the optical ultra¿precision vibration isolation system
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2005 ◽
Vol 297-300
◽
pp. 2333-2338
2009 ◽
Vol 10
(1)
◽
pp. 25-31
2010 ◽
Vol 44-47
◽
pp. 4176-4180
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