Implant Optimization for a 180nm BCD Technology

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2019.8791817 ◽

2019 ◽

Author(s):

B. Greenwood ◽

L. Roszol ◽

M. Nagy ◽

G. Molnar ◽

Z. Kiss ◽

...

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