Integrated Targeting, Near Real-Time Scheduling, and Dispatching with Automated Execution in Semiconductor Manufacturing

2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2007.4595689 ◽

2007 ◽

Cited By ~ 3

Author(s):

Nirmal Govind ◽

Eric Bullock ◽

Linling He ◽

Bala Iyer ◽

Murali Krishna ◽

...

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Real Time Scheduling ◽

Time Scheduling

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Meta-heuristics for dynamic real time scheduling of diffusion furnace in semiconductor manufacturing industry

International Journal of Industrial and Systems Engineering ◽

10.1504/ijise.2020.10027375 ◽

2020 ◽

Vol 34 (3) ◽

pp. 365

Author(s):

M. Mathirajan ◽

M. Vimala Rani

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing Industry ◽

Real Time Scheduling ◽

Time Scheduling

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2102 Real-time Scheduling for a Semiconductor Manufacturing System using a Neural Network

The Proceedings of Manufacturing Systems Division Conference ◽

10.1299/jsmemsd.2006.21 ◽

2006 ◽

Vol 2006 (0) ◽

pp. 21-22 ◽

Cited By ~ 1

Author(s):

Toru EGUCHI ◽

Koji WADA ◽

Isao OOOKA ◽

Fuminori OBA

Keyword(s):

Neural Network ◽

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing System ◽

Real Time Scheduling ◽

Time Scheduling

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Modeling and Real-Time Scheduling of Semiconductor Manufacturing Line Based on Simulation

Bio-Inspired Computational Intelligence and Applications - Lecture Notes in Computer Science ◽

10.1007/978-3-540-74769-7_62 ◽

2007 ◽

pp. 579-589 ◽

Cited By ~ 1

Author(s):

Zhongjie Wang ◽

Xinhua Jiang ◽

Qidi Wu

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Real Time Scheduling ◽

Manufacturing Line ◽

Time Scheduling

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3717 Real-time Scheduling Using a Neural Network in Semiconductor Manufacturing Systems : Training using a Simplified Model with Consideration to Bottleneck Machines

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2007.4.0_335 ◽

2007 ◽

Vol 2007.4 (0) ◽

pp. 335-336

Author(s):

Isao OOOKAI ◽

Toru EGUCHI

Keyword(s):

Neural Network ◽

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing Systems ◽

Simplified Model ◽

Real Time Scheduling ◽

Time Scheduling

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Short-interval expository real-time scheduling of semiconductor manufacturing with mixed integer programming

Proceedings of the Winter Simulation Conference 2014 ◽

10.1109/wsc.2014.7020093 ◽

2014 ◽

Author(s):

Myoungsoo Ham ◽

Siyoung Choi

Keyword(s):

Integer Programming ◽

Real Time ◽

Mixed Integer Programming ◽

Semiconductor Manufacturing ◽

Short Interval ◽

Mixed Integer ◽

Real Time Scheduling ◽

Time Scheduling

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Meta-heuristics for dynamic real time scheduling of diffusion furnace in semiconductor manufacturing industry

International Journal of Industrial and Systems Engineering ◽

10.1504/ijise.2020.105737 ◽

2020 ◽

Vol 34 (3) ◽

pp. 365

Author(s):

M. Vimala Rani ◽

M. Mathirajan

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing Industry ◽

Real Time Scheduling ◽

Time Scheduling

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Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

2007 IEEE International Conference on Systems, Man and Cybernetics ◽

10.1109/icsmc.2007.4413762 ◽

2007 ◽

Author(s):

Huai Zhang ◽

Zhibin Jiang ◽

Chengtao Guo

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing System ◽

Real Time Scheduling ◽

Simulation Based ◽

Time Scheduling ◽

Scheduling Method

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1011 Real-time Scheduling for Semiconductor Manufacturing System using a Neural Network

The Proceedings of Conference of Chugoku-Shikoku Branch ◽

10.1299/jsmecs.2006.44.393 ◽

2006 ◽

Vol 2006.44 (0) ◽

pp. 393-394

Author(s):

Koji Wada ◽

Toru Eguchi ◽

Fuminori Oba ◽

Takeshi Murayama

Keyword(s):

Neural Network ◽

Real Time ◽

Semiconductor Manufacturing ◽

Manufacturing System ◽

Real Time Scheduling ◽

Time Scheduling

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Operations Management in Automated Semiconductor Manufacturing With Integrated Targeting, Near Real-Time Scheduling, and Dispatching

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2008.2001211 ◽

2008 ◽

Vol 21 (3) ◽

pp. 363-370 ◽

Cited By ~ 12

Author(s):

N. Govind ◽

E.W. Bullock ◽

Linling He ◽

B. Iyer ◽

M. Krishna ◽

...

Keyword(s):

Real Time ◽

Operations Management ◽

Semiconductor Manufacturing ◽

Real Time Scheduling ◽

Time Scheduling

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Real-Time Scheduling and Control of Cluster Tools in Semiconductor Manufacturing

IFAC Proceedings Volumes ◽

10.3182/20090610-3-it-4004.00003 ◽

2009 ◽

Vol 42 (5) ◽

pp. 1

Author(s):

MengChu Zhou

Keyword(s):

Real Time ◽

Semiconductor Manufacturing ◽

Real Time Scheduling ◽

Cluster Tools ◽

Time Scheduling ◽

And Control

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