Analysis of wafer process duration for ab initio calculation of capacity, throughput and bottleneck equipments in a wafer fab
1985 ◽
Vol 46
(12)
◽
pp. 2197-2202
◽
Keyword(s):
1987 ◽
Vol 48
(C9)
◽
pp. C9-509-C9-512
Keyword(s):
2003 ◽
Vol 51
(13)
◽
pp. 3885-3893
◽