Advanced STI patterning for 70 nm DRAM technology and beyond

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) ◽

10.1109/asmc.2004.1309541 ◽

2004 ◽

Author(s):

M. Stavrev ◽

A. Scire ◽

M. Vogt ◽

P. Klingbeil ◽

Chun-Cheng Liao ◽

...

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