Precision and accuracy of CD-SEM profile reconstruction for the 110 technology node

Author(s):  
T. Marschner ◽  
C. Stief
2020 ◽  
Vol 64 (1-4) ◽  
pp. 621-629
Author(s):  
Yingsong Zhao ◽  
Cherdpong Jomdecha ◽  
Shejuan Xie ◽  
Zhenmao Chen ◽  
Pan Qi ◽  
...  

In this paper, the conventional database type fast forward solver for efficient simulation of eddy current testing (ECT) signals is upgraded by using an advanced multi-media finite element (MME) at the crack edge for treating inversion of complex shaped crack. Because the analysis domain is limited at the crack region, the fast forward solver can significantly improve the numerical accuracy and efficiency once the coefficient matrices of the MME can be properly calculated. Instead of the Gauss point classification, a new scheme to calculate the coefficient matrix of the MME is proposed and implemented to upgrade the ECT fast forward solver. To verify its efficiency and the feasibility for reconstruction of complex shaped crack, several cracks were reconstructed through inverse analysis using the new MME scheme. The numerical results proved that the upgraded fast forward solver can give better accuracy for simulating ECT signals, and consequently gives better crack profile reconstruction.


1974 ◽  
Vol 75 (1) ◽  
pp. 133-140 ◽  
Author(s):  
B. E. Senior

ABSTRACT A radioimmunoassay was developed to measure the levels of oestrone and oestradiol in 0.5–1.0 ml of domestic fowl peripheral plasma. The oestrogens were extracted with diethyl ether, chromatographed on columns of Sephadex LH-20 and assayed with an antiserum prepared against oestradiol-17β-succinyl-bovine serum albumin using a 17 h incubation at 4°C. The specificity, sensitivity, precision and accuracy of the assays were satisfactory. Oestrogen concentrations were determined in the plasma of birds in various reproductive states. In laying hens the ranges of oestrone and oestradiol were 12–190 pg/ml and 29–327 pg/ml respectively. Levels in immature birds, in adult cockerels and in an ovariectomized hen were barely detectable. The mean concentrations of oestrone and oestradiol in the plasma of four non-laying hens (55 pg/ml and 72 pg/ml respectively) and one partially ovariectomized hen (71 pg/ml and 134 pg/ml respectively) were well within the range for laying hens. It is evident that the large, yolk-filled follicles are not the only source of oestrogens in the chicken ovary.


Diabetes ◽  
2019 ◽  
Vol 68 (Supplement 1) ◽  
pp. 971-P
Author(s):  
SUN ZENGMEI ◽  
WU YUNHONG ◽  
WANG SUYUAN ◽  
ZHAO YANFANG ◽  
YANG JING ◽  
...  

2019 ◽  
Vol 2 (1) ◽  
pp. 5
Author(s):  
Hendra Budi Sungkawa ◽  
Inten Ayu Kusuma

Abstract : Pipetting is one of the most important activities in health laboratory analysis. Knowledge of pipetting must be owned by every health laboratory. Students of health analyst as a candidate of health laboratory who will become medical support service unit is expected to be able to do the pipetting precision and accurately. To get a thorough and accurate results then the results of the analysis must be located within a specifc control area and both in precision and accuracy. Precision and accuracy are responsible for analytical interpretation of test results and testing procedures. The method use in this research is the forward method by 61 people research samples which determined by simple random sampling. While the research design used was observational analytics. Based on the results of the research obtained the level of knowledge of respondents research is 71,38; precision pipetting 99,69% and accuracy pipetting 99,58%. From the data that has been obtained then analyzed statistically using tau kendau test. The result indicates that the level of knowledge and precision has a p=0,640 and correlation coeffcient of -0,044 so that the Ho is accepted, meaning there is no relationship between the level of knowledge and precision meaningful. Meanwhile, the level of knowledge and accuracy of the p=0,574 and correlation coeffcient value is -0,053 so that Ho is accepted, it means there is no relationship between the level of knowledge with accuracy. Abstrak: Pemipetan merupakan salah satu kegiatan yang sangat penting dalam analisa laboratorium kesehatan. Pengetahuan pemipetan harus dimiliki oleh setiap tenaga laboratorium kesehatan. Mahasiswa analis kesehatan sebagai calon tenaga laboratorium kesehatan yang akan menjadi unit pelayanan penunjang medis diharapkan mampu melakukan pemipetan dengan teliti dan akurat. Untuk mendapatkan hasil yang teliti dan akurat maka hasil analisa harus terletak di dalam daerah kontrol tertentu dan baik dalam presisi maupun akurasi. Presisi dan akurasi bertanggung jawab terhadap interpretasi analitik hasil pengujian serta prosedur pengujian. Metode yang dilakukan dalam penelitian ini adalah metode forward oleh sampel penelitian sebanyak 61 orang yang ditentukan secara simple random sampling. Sedangkan desain penelitian yang digunakan adalah observasional analitik. Berdasarkan dari hasil penelitian diperoleh nilai tingkat pengetahuan responden penelitian adalah 71,38; presisi pemipetan 99,69% dan akurasi pemipetannya 99,58%. Dari data yang telah didapatkan kemudian dianalisis secara statistik menggunakan uji kendal tau. Untuk tingkat pengetahuan dengan presisi didapatkan hasil nilai p=0,640 dan koefsien korelasi -0,044 sehingga Ho diterima, berarti tidak ada hubungan antara tingkat pengetahuan dan presisi. Untuk tingkat pengetahuan dengan akurasi nilai p=0,574 dan koefsien korelasi adalah -0,053 sehingga Ho diterima, berarti tidak ada hubungan antara tingkat pengetahuan dengan akurasi.


2019 ◽  
Author(s):  
Chem Int

Recent study was conducted to develop a simple UV spectrophotometric method to determine Phenytoin in bulk and injection form according to official requirement and validate as per ICH guidelines. λmax of Phenytoin was found 202 nm. Linearity existed perceived in the concentration assortment 2-8 μg/ml (r2 = 0.999) for the method. The method was validated pertaining to linearity, precision and accuracy studies, LOD and LOQ consistent with ICH guidelines. The existent method was establish to be simple, linear, precise, accurate as well as sensitive and can be applied for routine quality control enquiry for the analysis of Phenytoin in bulk and injection form.


Author(s):  
Sajal Biring

Abstract The FinFET has been introduced in the last decade to provide better transistor performance as the device size shrinks. The performance of FinFET is highly sensitive to the size and shape of the fin, which needs to be optimized with tighter control. Manual measurement of nano-scale features on TEM images of FinFET is not only a time consuming and tedious task, but also prone to error owing to visual judgment. Here, an auto-metrology approach is presented to extract the measured values with higher precision and accuracy so that the uncertainty in the manual measurement can be minimized. Firstly, a FinFET TEM image is processed through an edge detecting algorithm to reveal the fin profile precisely. Finally, an algorithm is utilized to calculate out the required geometrical data relevant to the FinFET parameters and summarizes them to a table or plots a graph based on the purpose of data interpretation. This auto-metrology approach is expected to be adopted by academia and/or industry for proper data analysis and interpretation with higher precision and efficiency.


Author(s):  
Zhigang Song ◽  
Jochonia Nxumalo ◽  
Manuel Villalobos ◽  
Sweta Pendyala

Abstract Pin leakage continues to be on the list of top yield detractors for microelectronics devices. It is simply manifested as elevated current with one pin or several pins during pin continuity test. Although many techniques are capable to globally localize the fault of pin leakage, root cause analysis and identification for it are still very challenging with today’s advanced failure analysis tools and techniques. It is because pin leakage can be caused by any type of defect, at any layer in the device and at any process step. This paper presents a case study to demonstrate how to combine multiple techniques to accurately identify the root cause of a pin leakage issue for a device manufactured using advanced technology node. The root cause was identified as under-etch issue during P+ implantation hard mask opening for ESD protection diode, causing P+ implantation missing, which was responsible for the nearly ohmic type pin leakage.


2018 ◽  
Vol 8 (4) ◽  
pp. 42-47
Author(s):  
Tien Nguyen Huu ◽  
Tram Le Thi Bao ◽  
Ngoc Nguyen Thi Nhu ◽  
Thang Phan Phuoc ◽  
Khan Nguyen Viet

Background: Curcumin is a major ingredient in turmeric (Curcuma longa L., Zingiberaceae), which has important activities such as anti-tumor, anti-inflammatory, antioxidant, anti-ischemia, protection of gastric mucosa etc,. Curcumin can be considered as a biological marker of turmeric and turmeric products. Objectives: Developing an HPLC method for quantification of curcumin in turmeric powder and turmeric - honey ball pills; applying this method for products on the market. Materials and methods: turmeric powder and turmeric - honey ball pills collected in Thua Thien Hue province. After optimization process, the method was validated and applied to evaluate the content of curcumin. Results: The chromatography analysis was performed with: Zorbaz Eclipse XDB-C18 (150 × 4.6 nm; 5 µm); Mobile phase: acetonitril: 2% acetic acid (45:55), Flow rate was kept constant at 1.0 ml/min; Detector PDA (420 nm). The method was validated for the HPLC system compatibility, specificity, linearity range, precision and accuracy; the recovery greater than 98%. Conclusion: The developed HPLC method can determine curcumin in turmeric powder and turmeric - honey ball pills. Key words: Curcumin, turmeric powder, turmeric-honey ball pills, quantitative determination, HPLC


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