Advanced process control based on lithographic defect inspection and reduction

2002 ◽  
Author(s):  
J. Leavey ◽  
J. Boyle ◽  
A. Skumanich
Keyword(s):  
Process Control ◽  
Defect Inspection ◽  
Advanced Process Control

“Front-end-ization” of the Back-End

2013 ◽  
Vol 2013 (1) ◽  
pp. 000799-000803
Author(s):  
Rajiv Roy
Keyword(s):  
Process Control ◽  
Defect Inspection ◽  
Advanced Process Control ◽  
Front End ◽  
Cost Of Ownership ◽  
Fine Pitch ◽  
Advanced Packaging ◽  
3D Stacking

The trend towards 3D stacking and advanced packaging has significantly altered the requirements for manufacturing tools in the back-end. Techniques and processes being adopted are beginning to resemble the front-end of 20 years ago but with updated and more affordable cost-of ownership capabilities. As an example, 0.5um defect inspection would have been considered a front-end requirement 20 years ago. Today TSV and advanced packaging techniques such as fine-pitch RDL are demanding 0.5u level inspection but at perhaps 10x improvement in wafer throughput and 20x improvement in COO. Other Front-end capabilities ranging from metrology to Advanced Process Control (APC) that are being adopted by the back-end will also be discussed.

Increasing revenue and reducing cost through the use of advanced process control technology in the sugar industry

2016 ◽  
pp. 620-624
Author(s):  
Scott Kahre
Keyword(s):  
Process Control ◽  
Sugar Industry ◽  
Operating Cost ◽  
Control Technology ◽  
Advanced Process Control ◽  
Output Controller ◽  
Complex Processes ◽  
Unit Operations ◽  
Sugar Unit ◽  
Optimum Cost

Advanced process control technology can provide sugar processors the ability to realize major revenue enhancements and/or operating cost reductions with low initial investment. One technology in particular, model predictive control (MPC), holds the potential to increase production, reduce energy costs, and reduce quality variability in a wide variety of major sugar unit operations. These include centrifugal stations, pulp dryers, extractors, diffusers, mills, evaporating crystallizers, juice purification, and more. Simple payback periods as low as two months are projected. As a PC-based add-on to existing distributed control systems (DCS) or programmable logic controller (PLC) systems, MPC acts as a multi-input, multi-output controller, utilizing predictive process response models and optimization functions to control complex processes to their optimum cost and quality constraints.

Implementation and benefits of advanced process control for lithography CD and overlay

2003 ◽  
Author(s):  
Lena Zavyalova ◽  
Chong-Cheng Fu ◽  
Gary S. Seligman ◽  
Perry A. Tapp ◽  
Victor Pol
Keyword(s):  
Process Control ◽  
Advanced Process Control

Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

2003 ◽  
Author(s):  
Timothy D. Stanley ◽  
Richard J. Markle ◽  
Brad Van Eck ◽  
Brian K. Cusson ◽  
Matthew A. Purdy ◽  
...  
Keyword(s):  
Process Control ◽  
Advanced Process Control
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