Some practical considerations in selecting the automated material transport system for a semiconductor factory

Author(s):  
J.J. Davis ◽  
P.K. Goel
2001 ◽  
Vol 67 (658) ◽  
pp. 1905-1911 ◽  
Author(s):  
Jun OTA ◽  
Tamio ARAI ◽  
Kousuke INOUE ◽  
Ryousuke CHIBA ◽  
Tomokazu HIRANO ◽  
...  

Author(s):  
Roberto Busato Belger ◽  
Luiz Eduardo Campos Pignatari ◽  
Luiz Alberto Dias Menezes Filho

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