Using queueing curve approximations in a fab to determine productivity improvements

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings ◽

10.1109/asmc.1996.557985 ◽

2002 ◽

Cited By ~ 12

Author(s):

L. Sattler

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