77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization

2011 ◽  
Author(s):  
M. O. Sallam ◽  
E. A. Soliman ◽  
S. Hassan ◽  
O. El Katteb ◽  
S. Sedky
Keyword(s):  
Circular Polarization ◽  
High Resistivity ◽  
High Resistivity Silicon ◽  
77 Ghz

scholarly journals Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process

2014 ◽  
Vol 2014 ◽  
pp. 1-9 ◽  
Author(s):  
Ali Attaran ◽  
Sazzadur Chowdhury
Keyword(s):  
Silicon Wafer ◽  
Beam Steering ◽  
Horn Antenna ◽  
Spectrum Analyzer ◽  
High Resistivity ◽  
Lift Off ◽  
Footprint Area ◽  
Silicon Based ◽  
High Resistivity Silicon ◽  
77 Ghz

Fabrication of a high resistivity silicon based microstrip Rotman lens using a lift-off process has been presented. The lens features 3 beam ports, 5 array ports, 16 dummy ports, and beam steering angles of ±10 degrees. The lens was fabricated on a 200 μm thick high resistivity silicon wafer and has a footprint area of 19.7 mm × 15.6 mm. The lens was tested as an integral part of a 77 GHz radar where a tunable X band source along with an 8 times multiplier was used as the RF source and the resulting millimeter wave signal centered at 77 GHz was radiated through a lens-antenna combination. A horn antenna with a downconverter harmonic mixer was used to receive the radiated signal and display the received signal in an Advantest R3271A spectrum analyzer. The superimposed transmit and receive signal in the spectrum analyzer showed the proper radar operation confirming the Rotman lens design.

JFET FOR COMPLETELY DEPLETED HIGH RESISTIVITY SILICON

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-363-C4-366 ◽  
Author(s):  
V. RADEKA ◽  
P. REHAK ◽  
S. RESCIA ◽  
E. GATTI ◽  
A. LONGONI ◽  
...  
Keyword(s):  
High Resistivity ◽  
High Resistivity Silicon

Beamforming Lens Antenna on a High Resistivity Silicon Wafer for 60 GHz WPAN

2010 ◽  
Vol 58 (3) ◽  
pp. 706-713 ◽  
Author(s):  
Woosung Lee ◽  
Jaeheung Kim ◽  
Choon Sik Cho ◽  
Young Joong Yoon
Keyword(s):  
Silicon Wafer ◽  
High Resistivity ◽  
60 Ghz ◽  
Lens Antenna ◽  
High Resistivity Silicon

Current assisted photonic mixing devices fabricated on high resistivity silicon

2008 ◽  
Author(s):  
L. Pancheri ◽  
D. Stoppa ◽  
N. Massari ◽  
M. Malfatti ◽  
C. Piemonte ◽  
...  
Keyword(s):  
High Resistivity ◽  
High Resistivity Silicon
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