Simulation of Optical Microscope Images for Photomask Feature Size Measurements
2001 ◽
Vol 196
(1-6)
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pp. 93-102
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1991 ◽
Vol 8
(5)
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pp. 778
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2019 ◽
Vol 49
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pp. 473-482
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Keyword(s):
1986 ◽
Vol 320
(1554)
◽
pp. 237-241
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1999 ◽
Vol 194
(2-3)
◽
pp. 369-373
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Keyword(s):
Keyword(s):