High efficiency and high stability 1KW RF generator for plasma applications

Author(s):  
Hojoon Yoo ◽  
Sang-Hyun Chun ◽  
Dong-Heon Lee ◽  
Ji-Yeon Kim ◽  
Jong-Heon Kim
2011 ◽  
Vol 383-390 ◽  
pp. 1333-1336
Author(s):  
Wei Qin ◽  
Yong Tao Li ◽  
Ying Jie Li ◽  
Xiao Ping Xu

In the previous literature about RF generator, Efficiency of output of RF generator can reach 60-70 percent. In this paper, a new 500W RF generator with high efficiency and high stability is designed and fabricated for plasma applications. The efficiency of a power amplifier in the RF generator is improved by using Class-E amplifier. The Class-E power amplifiers described here is based on a load network synthesized to have a transient response which maximizes power efficiency even if the active device switching times are substantial fractions of the AC cycle. For that circuit, the author measures 73 percent efficiency of output of RF generator at 13.56MHZ and 478W output from DE375 MOSFET. The main reasons of power dissipation mainly are analyzed, and some measures are taken to improve them by the optimization principles and experimental results and the efficiency of the power output can reach above 70 percent.


2009 ◽  
Vol 58 (5) ◽  
pp. 3193
Author(s):  
Zhang Yu-Ping ◽  
Zhang Hui-Yun ◽  
Zhong Kai ◽  
Wang Peng ◽  
Li Xi-Fu ◽  
...  

2018 ◽  
Vol 49 (1) ◽  
pp. 328-331
Author(s):  
Monima Sarma ◽  
Ken-Tsung Wong ◽  
Shun-Wei Liu ◽  
Wen-Yi Hung

2019 ◽  
Vol 7 (34) ◽  
pp. 19881-19888 ◽  
Author(s):  
Changjian Song ◽  
Xiaodong Li ◽  
Yueming Wang ◽  
Sheng Fu ◽  
Li Wan ◽  
...  

A sulfonyl-based IDIS-Th passivated perovskite film for high-efficiency and high-stability perovskite solar cells.


2020 ◽  
Vol 1 (1) ◽  
pp. 63-76 ◽  
Author(s):  
Xiaopeng Zheng ◽  
Abdullah Y. Alsalloum ◽  
Yi Hou ◽  
Edward H. Sargent ◽  
Osman M. Bakr

2018 ◽  
Vol 30 (36) ◽  
pp. 1804637 ◽  
Author(s):  
Xiangyue Meng ◽  
Junshuai Zhou ◽  
Jie Hou ◽  
Xia Tao ◽  
Sin Hang Cheung ◽  
...  

2015 ◽  
Vol 1771 ◽  
pp. 171-179 ◽  
Author(s):  
Zonglong Zhu ◽  
Shihe Yang

ABSTRACTPerovskite solar cells have caught wide attention. High efficiency, low-cost and high stability are among the major goals, which could eventually move the perovskite solar cells to the market. To achieve these goals, interface deliberation and nanostructural engineering hold the key.


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