High efficiency and high stability 1KW RF generator for plasma applications
2011 ◽
Vol 383-390
◽
pp. 1333-1336
Keyword(s):
2009 ◽
Vol 20
(1)
◽
pp. 1-11
Keyword(s):
2019 ◽
Vol 7
(34)
◽
pp. 19881-19888
◽
Keyword(s):
2020 ◽
Vol 1
(1)
◽
pp. 63-76
◽
Keyword(s):