Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor

2013 ◽  
Author(s):  
Busara Piriyanont ◽  
S. O. Reza Moheimani
Keyword(s):  
Force Sensor ◽  
Micro Gripper

Development of a Novel Micro-Gripper Integrating Tri-Axial Force Sensor

2007 ◽  
Author(s):  
Jiachou Wang ◽  
Weibin Rong ◽  
Lining Sun ◽  
Hui Xie ◽  
Wei Chen
Keyword(s):  
Axial Force ◽  
Crystalline Silicon ◽  
Force Sensor ◽  
Calibration Method ◽  
Deep Reactive Ion Etching ◽  
Micro Gripper ◽  
The Cross ◽  
Silicon Frame ◽  
High Level ◽  
Cross Structure

A novel micro gripper integrating tri-axial force sensor and two grades displacement amplifier is presented in this paper, which bases on the technology of Piezoresistive detection and use PZT as its micro driving component. The micro tri-axial force sensor is fabricated on a single-crystalline-silicon by the technology of MEMS and consists of a flexible cross-structure realized by deep reactive ion etching (DRIE). The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure. After modeling the amplifier structure of micro gripper and the sensor, finite element method (FEM) is used to analyze the displacement of the micro gripper and the deformation of the cross-structure elastic cantilever. A calibration method of tri-axial sensor based on the technology of microscopic vision and the principle of bending deflection cantilever is proposed. The experimental verified that the sensor are high level of intrinsic decoupling of the signals from strain gauge, high resolutions in all three axes, high linearity and repeatability and simple produce of calculation. And also show the micro gripper is reasonable and practical. The sensor is capable of resolving forces up to 10mN with resolution of 2.4μN in x axis and y axis and up to 10mN with resolution of 4.2μN in z axis; the gripping displacement of the micro gripper is from 20μm to 300μm.

Design and characterization of a silicon piezoresistive three-axial force sensor for micro-flapping wing MAV applications

2015 ◽  
Author(s):  
Wei Zhang ◽  
Van T. Truong ◽  
Kim B. Lua ◽  
A. S. Kumar ◽  
Tee Tai Lim ◽  
...  
Keyword(s):  
Axial Force ◽  
Force Sensor ◽  
Flapping Wing

Force Controlled Manipulation of Biological Cells Using a Monolithic MEMS Based Nano-Micro Gripper

2012 ◽  
Author(s):  
Ali A. Abbasi ◽  
M. T. Ahmadian
Keyword(s):  
Liquid Medium ◽  
Force Control ◽  
Force Sensor ◽  
Rapid Response ◽  
Pid Controllers ◽  
Biological Cells ◽  
Matlab Software ◽  
Micro Gripper ◽  
The Future ◽  
Geometrical Dimensions

Nano-micro grippers are able to pick-transport-place the micro or nanometer–sized materials, such as manipulation of biological cells or DNA molecules in a liquid medium. This paper proposes a novel monolithic nano-micro gripper structure with two axis piezoresistive force sensor which its resolution is under nanoNewton. The results of the study have been obtained by the simulation of the proposed gripper structure in Matlab software. Motion of the gripper arm is produced by a voice coil actuator. The behavior of the cell has been derived using the assumptions in the literatures. Moreover, two simple PID controllers, one for control of the gripper motion and another for control of the force during manipulation of a biologic cell, have been implemented. Although the proposed gripper has not been fabricated, since the geometrical dimensions of the proposed gripper is the same as previously developed electrothermally actuated micro-nano gripper, the results of force control have been also compared with it. The simulated results with the very simple PID force controller which has a more rapid response than previously developed electrothermally actuated micro-nano gripper show that the designed gripper has the potential to be considered and fabricated for manipulation of biological cells in the future.

DEVELOPMENT AND CHARACTERIZATION OF A SILICON-BASED THREE AXIAL FORCE SENSOR

2005 ◽  
Author(s):  
F. VALVO ◽  
P. VALDASTRI ◽  
S. ROCCELLA ◽  
L. BECCAI ◽  
A. MENCIASSI ◽  
...  
Keyword(s):  
Axial Force ◽  
Force Sensor ◽  
Silicon Based

Design and characterization of a T-shaped two-axis force sensor

Sensor Review ◽  
2019 ◽  
Vol 39 (6) ◽  
pp. 776-782
Author(s):  
Liang Zhong ◽  
Feifei Li ◽  
Yuxin Peng ◽  
Qiang Yang ◽  
Mingming Zhang ◽  
...  
Keyword(s):  
Design Methodology ◽  
Simple Structure ◽  
Force Sensor ◽  
The Other ◽  
Strain Gauges ◽  
Content Type ◽  
Sensor Head ◽  
Compact Size ◽  
Basic Performance

Purpose This paper aims to propose a type of T-shaped two-axis force sensor for measuring the forces in x- and z-axes. The developed sensor has a simple structure and can be effectively assembled into compact devices. Design/methodology/approach A T-shaped plate, with both ends fixed on a base, is used as the substrate of the sensor. Eight strain gauges are placed in the root of the plate or near the sensor head, which can construct two full Wheatstone bridges on the upper and lower surfaces of the plate. When the x- or z-axes forces are applied to the sensor head, different deformation can be generated to the strain gauges. Therefore, the two Wheatstone bridges can be constructed with a different configuration for measuring the forces in x- or z-axes, respectively. Findings A prototype was designed and constructed and experiments were carried out to test the basic performance of the sensor. It has been verified that the developed sensor could measure the x- and z-axes forces independently with a high resolution of 2.5 and 5 mN, respectively. Originality/value Only one thin plate was used in the design, the forces in x- and z-axes could be measured independently and simultaneously, which made the sensor with a simple structure and compact size. Experiments were also verified that there was no crosstalk error occurred in one axis when the force was applied to the other axis.

Characterization of a highly sensitive silicon based three-axial piezoresistive force sensor

2012 ◽  
Author(s):  
Nouha Al Cheikh ◽  
Caroline Coutier ◽  
Jean Brun ◽  
Christophe Poulain ◽  
Henri Blanc ◽  
...  
Keyword(s):  
Force Sensor ◽  
Highly Sensitive ◽  
Silicon Based
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