Finite element analysis of PMMA pattern formation during hot embossing process

Author(s):  
Choon Meng Kiew ◽  
Wen-Jong Lin ◽  
Tat Joo Teo ◽  
Jun Liang Tan ◽  
Wei Lin ◽  
...  
2011 ◽  
Vol 422 ◽  
pp. 397-400 ◽  
Author(s):  
Pei Song Chee ◽  
Ruzairi Abdul Rahim ◽  
U. Hashim ◽  
Rashidah Arsat ◽  
Pei Ling Leow

Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized via finite element analysis (FEA). The experiment result shows that the pump works well at low frequency of 29 Hz.


2002 ◽  
Vol 11 (1) ◽  
pp. 30-40 ◽  
Author(s):  
Chatchai Kunavisarut ◽  
Lisa A. Lang ◽  
Brian R. Stoner ◽  
David A. Felton

Sign in / Sign up

Export Citation Format

Share Document