Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam
2006 ◽
Vol 16
(9)
◽
pp. 1800-1810
◽
2009 ◽
Vol 4
(4)
◽
pp. 54-56
Keyword(s):
2019 ◽
Keyword(s):
2019 ◽
Vol 67
(3)
◽
pp. 142-154
◽
Keyword(s):