Piezoelectric scanners for atomic force microscopes: design of lateral sensors, identification and control
2018 ◽
Vol 23
(1)
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pp. 424-433
◽
2013 ◽
Vol 24
(11)
◽
pp. 115008
◽
2011 ◽
Vol 257
(22)
◽
pp. 9243-9250
◽
2018 ◽
Vol 29
(10)
◽
pp. 105101
◽
Keyword(s):
Keyword(s):