Control system design for a rapid thermal processing system

2001 ◽  
Vol 9 (1) ◽  
pp. 122-129 ◽  
Author(s):  
Ching-An lin ◽  
Yaw-Kuen Jan
Keyword(s):  
Control System ◽  
System Design ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Processing System ◽  
Control System Design

Review of rapid thermal processing: system design and applications

1992 ◽  
Author(s):  
Xiao-Li Xu ◽  
Jim J. Wortman ◽  
Mehmet C. Ozturk ◽  
Furman Y. Sorrell
Keyword(s):  
System Design ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Processing System

Heat Balance Evaluation for Rapid Thermal Processing System Design

2005 ◽  
Vol 152 (12) ◽  
pp. G924 ◽  
Author(s):  
Hitoshi Habuka ◽  
Tomoyuki Wada ◽  
Takashi Sakurai ◽  
Takashi Takeuchi ◽  
Masahiko Aihara
Keyword(s):  
System Design ◽  
Heat Balance ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Processing System
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