Linearization of electrostatically actuated surface micromachined 2-D optical scanner
2001 ◽
Vol 10
(2)
◽
pp. 205-214
◽
2008 ◽
Vol E91-C
(10)
◽
pp. 1611-1615
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2010 ◽
Vol 130
(9)
◽
pp. 1102-1107
2012 ◽
Vol 132
(1)
◽
pp. 1-9
◽
Keyword(s):
2010 ◽
Vol 49
(4)
◽
pp. 04DL19
◽
2010 ◽
Vol 24
(6)
◽
pp. 1621-1633
◽