Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry

H.Q. Hou; H.C. Chui; K.D. Choquette; B.E. Hammons; W.G. Breiland; K.M. Geib

doi:10.1109/68.536629

Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry

IEEE Photonics Technology Letters ◽

10.1109/68.536629 ◽

1996 ◽

Vol 8 (10) ◽

pp. 1285-1287 ◽

Cited By ~ 29

Author(s):

H.Q. Hou ◽

H.C. Chui ◽

K.D. Choquette ◽

B.E. Hammons ◽

W.G. Breiland ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Highly Uniform

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Vertical cavity surface emitting lasers with 21% efficiency by metalorganic vapor phase epitaxy

IEEE Photonics Technology Letters ◽

10.1109/68.324666 ◽

1994 ◽

Vol 6 (9) ◽

pp. 1053-1055 ◽

Cited By ~ 51

Author(s):

K.L. Lear ◽

R.P. Schneider ◽

K.D. Choquette ◽

S.P. Kilcoyne ◽

J.J. Figiel ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Vertical-cavity surface-emitting-lasers with 21% efficiency by metalorganic vapor phase epitaxy

Proceedings of IEEE 14th International Semiconductor Laser Conference ISLC-94 ◽

10.1109/islc.1994.519324 ◽

2002 ◽

Cited By ~ 5

Author(s):

K.L. Lear ◽

R.P. Schneider ◽

K.D. Choquette ◽

S.P. Kilcoyne ◽

J.J. Figiel ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Manufacturability of vertical-cavity surface emitting lasers grown by organometallic vapor phase epitaxy

10.2172/225049 ◽

1996 ◽

Cited By ~ 1

Author(s):

H.Q. Hou ◽

H.C. Chui ◽

B.E. Hammons ◽

W.G. Breiland ◽

K.D. Choquette

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Organometallic Vapor Phase Epitaxy ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity

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Precise etch-depth control of microlens-integrated intracavity contacted vertical-cavity surface-emitting lasers by in-situ laser reflectometry and reflectivity modeling

Thin Solid Films ◽

10.1016/j.tsf.2009.03.198 ◽

2009 ◽

Vol 517 (19) ◽

pp. 5773-5778 ◽

Cited By ~ 10

Author(s):

Y.M. Song ◽

K.S. Chang ◽

B.H. Na ◽

J.S. Yu ◽

Y.T. Lee

Keyword(s):

Cavity Surface ◽

Etch Depth ◽

Surface Emitting Lasers ◽

Depth Control ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Laser Reflectometry

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Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD

Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557) ◽

10.1109/cleopr.2001.971098 ◽

2002 ◽

Author(s):

H.J. Jang ◽

Y.H. Song ◽

B.J. Jeong ◽

K.H. Lee ◽

J.K. Son ◽

...

Keyword(s):

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Highly Uniform

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Selective area metalorganic vapor phase epitaxy growth of prism-shaped GaAs resonators for folded cavity surface emitting lasers

Journal of Crystal Growth ◽

10.1016/s0022-0248(98)00573-9 ◽

1998 ◽

Vol 195 (1-4) ◽

pp. 474-478 ◽

Cited By ~ 1

Author(s):

W Strupiñski ◽

A Maląg ◽

J Ratajczak

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Selective Area ◽

Surface Emitting Lasers ◽

Emitting Lasers

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InGaAsP(1.3 μm)/InP vertical‐cavity surface‐emitting laser grown by metalorganic vapor phase epitaxy

Applied Physics Letters ◽

10.1063/1.102619 ◽

1990 ◽

Vol 56 (10) ◽

pp. 889-891 ◽

Cited By ~ 14

Author(s):

Long Yang ◽

Ming C. Wu ◽

Kuochou Tai ◽

Tawee Tanbun‐Ek ◽

Ralph A. Logan

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Cavity Surface ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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Room-temperature pulsed operation of 1.5 μm triple fused vertical cavity surface emitting lasers with in-situ built-in lateral current confinement

Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130) ◽

10.1109/islc.1998.734159 ◽

2002 ◽

Author(s):

A.V. Syrbu ◽

V.P. Lakovlev ◽

C.-A. Berseth ◽

O. Dehaese ◽

A. Rudra ◽

...

Keyword(s):

Room Temperature ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Current Confinement ◽

Lateral Current ◽

Emitting Lasers ◽

Vertical Cavity

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Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays

IEEE Photonics Technology Letters ◽

10.1109/68.841252 ◽

2000 ◽

Vol 12 (5) ◽

pp. 459-461 ◽

Cited By ~ 40

Author(s):

S. Eitel ◽

S.J. Fancey ◽

H.-P. Gauggel ◽

K.-H. Gulden ◽

W. Bachtold ◽

...

Keyword(s):

Cavity Surface ◽

Microlens Arrays ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Highly Uniform

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Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE

10.1117/12.271070 ◽

1997 ◽

Cited By ~ 3

Author(s):

Hong Q. Hou ◽

Kent D. Choquette ◽

B. E. Hammons ◽

William G. Breiland ◽

Mary H. Crawford ◽

...

Keyword(s):

Near Infrared ◽

Cavity Surface ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Vertical Cavity ◽

Highly Uniform

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