Accurate molecular beam epitaxial growth of vertical-cavity surface-emitting laser using diode laser reflectometry

G.S. Li; W. Yuen; K. Toh; L.E. Eng; S.F. Lim; C.J. Chang-Hasnain

doi:10.1109/68.414672

Accurate molecular beam epitaxial growth of vertical-cavity surface-emitting laser using diode laser reflectometry

IEEE Photonics Technology Letters ◽

10.1109/68.414672 ◽

1995 ◽

Vol 7 (9) ◽

pp. 971-973 ◽

Cited By ~ 8

Author(s):

G.S. Li ◽

W. Yuen ◽

K. Toh ◽

L.E. Eng ◽

S.F. Lim ◽

...

Keyword(s):

Epitaxial Growth ◽

Diode Laser ◽

Molecular Beam ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Molecular Beam Epitaxial Growth ◽

Vertical Cavity ◽

Laser Reflectometry

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Molecular beam epitaxial growth of vertical cavity surface emitting lasers with digital alloys and digital gradings

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.591439 ◽

2000 ◽

Vol 18 (3) ◽

pp. 1619 ◽

Cited By ~ 9

Author(s):

P. G. Newman ◽

J. Pamulapati ◽

H. Shen ◽

M. Taysing-Lara ◽

J. Liu ◽

...

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Digital Alloys ◽

Emitting Lasers ◽

Molecular Beam Epitaxial Growth ◽

Vertical Cavity

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Molecular beam epitaxial growth of monolithic 1.55 μm vertical cavity surface emitting lasers with AlGaAsSb/AlAsSb Bragg mirrors

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.591436 ◽

2000 ◽

Vol 18 (3) ◽

pp. 1601 ◽

Cited By ~ 8

Author(s):

G. Almuneau ◽

E. Hall ◽

S. Nakagawa ◽

J. K. Kim ◽

D. Lofgreen ◽

...

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Surface Emitting Lasers ◽

Vertical Cavity Surface ◽

Emitting Lasers ◽

Molecular Beam Epitaxial Growth ◽

Vertical Cavity

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InGaAs-GaAs Quantum Well Vertical-Cavity Surface-Emitting Laser Using Molecular Beam Epitaxial Regrowth

10.21236/ada238414 ◽

1991 ◽

Author(s):

C. Lei ◽

T. J. Rogers ◽

D. G. Deppe ◽

B. G. Streetman

Keyword(s):

Quantum Well ◽

Molecular Beam ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Epitaxial Regrowth ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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Vertical-cavity surface-emitting laser diodes fabricated by in situ dry etching and molecular beam epitaxial regrowth

IEEE Photonics Technology Letters ◽

10.1109/68.205613 ◽

1993 ◽

Vol 5 (3) ◽

pp. 284-287 ◽

Cited By ~ 19

Author(s):

K.D. Choquette ◽

M. Hong ◽

R.S. Freund ◽

J.P. Mannaerts ◽

R.C. Wetzel ◽

...

Keyword(s):

Molecular Beam ◽

Laser Diodes ◽

Dry Etching ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Epitaxial Regrowth ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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Molecular beam epitaxial regrowth on diffraction gratings for vertical-cavity, surface-emitting laser-based integrated optoelectronics

Journal of Applied Physics ◽

10.1063/1.1786337 ◽

2004 ◽

Vol 96 (8) ◽

pp. 4050-4055 ◽

Cited By ~ 6

Author(s):

G. W. Pickrell ◽

C. F. Xu ◽

D. A. Louderback ◽

H. C. Lin ◽

M. A. Fish ◽

...

Keyword(s):

Molecular Beam ◽

Diffraction Gratings ◽

Cavity Surface ◽

Integrated Optoelectronics ◽

Molecular Beam Epitaxial ◽

Epitaxial Regrowth ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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InGaAs‐GaAs quantum well vertical‐cavity surface‐emitting laser using molecular beam epitaxial regrowth

Applied Physics Letters ◽

10.1063/1.104390 ◽

1991 ◽

Vol 58 (11) ◽

pp. 1122-1124 ◽

Cited By ~ 23

Author(s):

C. Lei ◽

T. J. Rogers ◽

D. G. Deppe ◽

B. G. Streetman

Keyword(s):

Quantum Well ◽

Molecular Beam ◽

Cavity Surface ◽

Molecular Beam Epitaxial ◽

Epitaxial Regrowth ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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Low threshold current GaAs/InGaAs vertical-cavity surface-emitting laser grown at a constant temperature by molecular beam epitaxy

ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings ◽

10.1109/smelec.1996.616475 ◽

2002 ◽

Author(s):

C.Y. Li ◽

D.H. Zhang ◽

S.F. Yoon

Keyword(s):

Molecular Beam Epitaxy ◽

Constant Temperature ◽

Molecular Beam ◽

Threshold Current ◽

Cavity Surface ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Low Threshold ◽

Vertical Cavity

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Molecular beam epitaxy growth method for vertical‐cavity surface‐emitting laser resonators based on substrate thermal emission

Applied Physics Letters ◽

10.1063/1.115379 ◽

1995 ◽

Vol 67 (25) ◽

pp. 3774-3776 ◽

Cited By ~ 1

Author(s):

J. J. Talghader ◽

M. A. Hadley ◽

J. S. Smith

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Thermal Emission ◽

Molecular Beam Epitaxy Growth ◽

Cavity Surface ◽

Laser Resonators ◽

Vertical Cavity Surface ◽

Growth Method ◽

Surface Emitting Laser ◽

Vertical Cavity

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Errata: “Midinfrared vertical-cavity surface-emitting laser” [Appl. Phys. Lett. 71, 3483 (1997)] “High-temperature type-II superlattice diode laser at λ=2.9 μm” [Appl. Phys. Lett. 71, 3607 (1997)] “Near-room-temperature midinfrared interband cascade laser” [Appl. Phys. Lett. 72, 2370 (1998)]

Applied Physics Letters ◽

10.1063/1.123188 ◽

1999 ◽

Vol 74 (4) ◽

pp. 628-629 ◽

Cited By ~ 1

Author(s):

C. L. Felix ◽

W. W. Bewley ◽

I. Vurgaftman ◽

J. R. Meyer ◽

L. Goldberg ◽

...

Keyword(s):

High Temperature ◽

Diode Laser ◽

Room Temperature ◽

Cavity Surface ◽

Type Ii ◽

Type Ii Superlattice ◽

Interband Cascade Laser ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Vertical Cavity

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Spin-polarized vertical-cavity surface-emitting laser: Epitaxial growth issues and device properties

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2194941 ◽

2006 ◽

Vol 24 (3) ◽

pp. 1510 ◽

Cited By ~ 2

Author(s):

M. Holub ◽

J. Shin ◽

S. Chakrabarti ◽

P. Bhattacharya

Keyword(s):

Epitaxial Growth ◽

Cavity Surface ◽

Spin Polarized ◽

Vertical Cavity Surface ◽

Surface Emitting Laser ◽

Device Properties ◽

Vertical Cavity

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