Analytic approximations for multiserver batch-service workstations with multiple process recipes in semiconductor wafer fabrication

Ming-Guang Huang;  Pao-Long Chang;  Ying-Chyi Chou

doi:10.1109/66.964327

Analytic approximations for multiserver batch-service workstations with multiple process recipes in semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.964327 ◽

2001 ◽

Vol 14 (4) ◽

pp. 395-405 ◽

Cited By ~ 12

Author(s):

Ming-Guang Huang ◽

Pao-Long Chang ◽

Ying-Chyi Chou

Keyword(s):

Wafer Fabrication ◽

Batch Service ◽

Semiconductor Wafer ◽

Analytic Approximations ◽

Semiconductor Wafer Fabrication ◽

Multiple Process

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A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

A Performance

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Scheduling semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.4384 ◽

1988 ◽

Vol 1 (3) ◽

pp. 115-130 ◽

Cited By ~ 449

Author(s):

L.M. Wein

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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AN ANALYSIS OF DISPATCHING RULES IN A SEMICONDUCTOR WAFER FABRICATION ENVIRONMENT

Journal of Electronics Manufacturing ◽

10.1142/s0960313195000190 ◽

1995 ◽

Vol 05 (03) ◽

pp. 165-174 ◽

Cited By ~ 6

Author(s):

THOMAS McCUTCHEN ◽

CHUNG-YEE LEE

Keyword(s):

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

Journal of Central South University of Technology ◽

10.1007/s11771-007-0077-1 ◽

2007 ◽

Vol 14 (3) ◽

pp. 393-398 ◽

Cited By ~ 6

Author(s):

Bing-hai Zhou ◽

Qing-zhi Pan ◽

Shi-jin Wang ◽

Bin Wu

Keyword(s):

Petri Nets ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Hybrid Petri Nets ◽

Semiconductor Wafer Fabrication ◽

Photolithography Process

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Simulation-based performance assessment of production planning formulations for semiconductor wafer fabrication

2015 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2015.7408392 ◽

2015 ◽

Cited By ~ 8

Author(s):

Timm Ziarnetzky ◽

N. Baris Kacar ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

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A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Processes ◽

10.3390/pr6020016 ◽

2018 ◽

Vol 6 (2) ◽

pp. 16 ◽

Cited By ~ 2

Author(s):

Liam Hsieh ◽

Tsung-Ju Hsieh

Keyword(s):

Management System ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Facilities Design ◽

Semiconductor Wafer Fabrication ◽

Design Systems

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Dynamic Release Control Policy for the Semiconductor Wafer Fabrication Lines

Journal of the Operational Research Society ◽

10.1057/jors.1996.195 ◽

1996 ◽

Vol 47 (12) ◽

pp. 1516-1525 ◽

Cited By ~ 13

Author(s):

Jongsoo Kim ◽

Robert C. Leachman ◽

Byungkyoo Suh

Keyword(s):

Control Policy ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Release Control

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Cancer Mortality Among US Workers Employed in Semiconductor Wafer Fabrication

Journal of Occupational and Environmental Medicine ◽

10.1097/jom.0b013e3181f7e520 ◽

2010 ◽

Vol 52 (11) ◽

pp. 1082-1097 ◽

Cited By ~ 23

Author(s):

John D. Boice ◽

Donald E. Marano ◽

Heather M. Munro ◽

Bandana K. Chadda ◽

Lisa B. Signorello ◽

...

Keyword(s):

Cancer Mortality ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Design of a lagrangian relaxation-based hierarchical production scheduling environment for semiconductor wafer fabrication

IEEE Transactions on Robotics and Automation ◽

10.1109/tra.2003.814512 ◽

2003 ◽

Vol 19 (4) ◽

pp. 566-578 ◽

Cited By ~ 26

Author(s):

Ting-Kai Hwang ◽

Shi-Chung Chang

Keyword(s):

Lagrangian Relaxation ◽

Production Scheduling ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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