Real-time control of reactive ion etching using neural networks
2000 ◽
Vol 13
(4)
◽
pp. 469-480
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 11
(3)
◽
pp. 401-409
◽
2019 ◽
Vol 37
(3)
◽
pp. 699-717
◽
Keyword(s):