1/f noise in etched groove surface acoustic wave (SAW) resonators

1994 ◽  
Vol 41 (6) ◽  
pp. 853-862 ◽  
Author(s):  
T.E. Parker ◽  
D. Andres ◽  
J.A. Greer ◽  
G.K. Montress
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Groove Surface ◽  
Saw Resonators

scholarly journals On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 303
Author(s):  
Giovanni Gugliandolo ◽  
Zlatica Marinković ◽  
Giuseppe Campobello ◽  
Giovanni Crupi ◽  
Nicola Donato
Keyword(s):  
Performance Evaluation ◽  
Acoustic Wave ◽  
Equivalent Circuit ◽  
Surface Acoustic Wave ◽  
Equivalent Circuit Model ◽  
Practical Applications ◽  
Saw Devices ◽  
S Parameter ◽  
Commercial Device ◽  
Saw Resonators

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

scholarly journals Surface Acoustic Wave (SAW) Resonators for Monitoring Conditioning Film Formation

Sensors ◽  
2015 ◽  
Vol 15 (5) ◽  
pp. 11873-11888 ◽  
Author(s):  
Siegfried Hohmann ◽  
Svea Kögel ◽  
Yvonne Brunner ◽  
Barbara Schmieg ◽  
Christina Ewald ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Formation ◽  
Conditioning Film ◽  
Saw Resonators

scholarly journals Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 141
Author(s):  
Qiaozhen Zhang ◽  
Zhenglin Chen ◽  
Yanguang Chen ◽  
Jiahe Dong ◽  
Panliang Tang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Order Reduction ◽  
Acoustic Resonator ◽  
Universal Method ◽  
Device Structure ◽  
Pde Model ◽  
Periodic Analysis ◽  
Digital Transducers ◽  
Saw Resonators

Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

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