A dual-mode thickness-shear quartz pressure sensor

1993 ◽  
Vol 40 (5) ◽  
pp. 584-591 ◽  
Author(s):  
R.J. Besson ◽  
J.J. Boy ◽  
B. Glotin ◽  
Y. Jinzaki ◽  
B. Sinha ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dual Mode ◽  
Thickness Shear

A Dual-Mode Thickness-Shear Quartz Pressure Sensor for High Pressure Applications

2018 ◽  
Vol 18 (12) ◽  
pp. 4893-4901 ◽  
Author(s):  
Mihir S. Patel ◽  
Bikash K. Sinha
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Dual Mode ◽  
Thickness Shear

A dual-mode thickness-shear quartz pressure sensor

2002 ◽  
Author(s):  
R.J. Besson ◽  
J.J. Boy ◽  
B. Glotin ◽  
Y. Jinzaki ◽  
B.K. Sinha ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dual Mode ◽  
Thickness Shear

Temperature calibrated on-chip dual-mode film bulk acoustic resonator pressure sensor with a sealed back-trench cavity

2018 ◽  
Vol 28 (7) ◽  
pp. 075010 ◽  
Author(s):  
Congcong Gu ◽  
Weipeng Xuan ◽  
Shurong Dong ◽  
Xiaozhi Wang ◽  
Honglang Li ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Acoustic Resonator ◽  
Dual Mode ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
On Chip

scholarly journals Sensors: Full Dynamic-Range Pressure Sensor Matrix Based on Optical and Electrical Dual-Mode Sensing (Adv. Mater. 15/2017)

2017 ◽  
Vol 29 (15) ◽  
Author(s):  
Xiandi Wang ◽  
Miaoling Que ◽  
Mengxiao Chen ◽  
Xun Han ◽  
Xiaoyi Li ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dynamic Range ◽  
Dual Mode ◽  
Full Dynamic Range

Full Dynamic-Range Pressure Sensor Matrix Based on Optical and Electrical Dual-Mode Sensing

2017 ◽  
Vol 29 (15) ◽  
pp. 1605817 ◽  
Author(s):  
Xiandi Wang ◽  
Miaoling Que ◽  
Mengxiao Chen ◽  
Xun Han ◽  
Xiaoyi Li ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dynamic Range ◽  
Dual Mode ◽  
Full Dynamic Range
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