Decomposition of fluorocarbon gaseous contaminants by surface discharge-induced plasma chemical processing
1993 ◽
Vol 29
(4)
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pp. 787-792
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1996 ◽
Vol 32
(1)
◽
pp. 118-124
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2012 ◽
Vol 16
(3)
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pp. 189-212
Keyword(s):
1978 ◽
Vol 29
(5)
◽
pp. 851-855
1998 ◽
Vol 31
(15)
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pp. 1852-1856
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Keyword(s):