Decomposition of fluorocarbon gaseous contaminants by surface discharge-induced plasma chemical processing

1993 ◽  
Vol 29 (4) ◽  
pp. 787-792 ◽  
Author(s):  
T. Oda ◽  
T. Takahashi ◽  
H. Nakano ◽  
S. Masuda
1996 ◽  
Vol 32 (1) ◽  
pp. 118-124 ◽  
Author(s):  
T. Oda ◽  
R. Yamashita ◽  
I. Haga ◽  
T. Takahashi ◽  
S. Masuda

Author(s):  
Dusan Kovacik ◽  
Pavel Stahel ◽  
Mirko Cernak ◽  
Richard Krumpolec ◽  
Dusan Kovacik ◽  
...  

1998 ◽  
Vol 31 (15) ◽  
pp. 1852-1856 ◽  
Author(s):  
Ouyang Jiting ◽  
Feng Changgen ◽  
Hui Hexing

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