Effects of discharge frequency on plasma characteristics and etching characteristics in high density Cl/sub 2/ plasma: comparison of ultrahigh-frequency plasma and radio-frequency plasma

1998 ◽  
Vol 26 (6) ◽  
pp. 1621-1627 ◽  
Author(s):  
S. Samukawa ◽  
H. Akashi
Keyword(s):  
Radio Frequency ◽  
High Density ◽  
Discharge Frequency ◽  
Ultrahigh Frequency ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Plasma Characteristics

Development of High-Density Radio Frequency Plasma Sources With Very Small Diameter for Propulsion

2018 ◽  
Vol 46 (2) ◽  
pp. 252-262 ◽  
Author(s):  
Shunjiro Shinohara ◽  
Daisuke Kuwahara ◽  
Takamichi Ishii ◽  
Hiraku Iwaya ◽  
Shuichi Nishimura ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Small Diameter ◽  
High Density ◽  
Radio Frequency Plasma ◽  
Plasma Sources ◽  
Frequency Plasma

Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes

2013 ◽  
Vol 41 (8) ◽  
pp. 1856-1862 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yoshiki Yahata ◽  
Johji Kagami ◽  
Yasushi Kawashimo ◽  
Tatsuya Takeuchi
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals Modification of a Fur Semi-finished Sheepskins by Radio Frequency Plasma in an Inert Gas Medium

2021 ◽  
Vol 1923 (1) ◽  
pp. 012020
Author(s):  
E A Pankova ◽  
F S Sharifullin ◽  
G R Rakhmatullina ◽  
R R Shagivalieva ◽  
V S Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Inert Gas ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Gas Medium
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